振动环模型电磁陀螺的设计 摘 要:为了提高陀螺仪的性能和优化设计,本文提出一种新型的振动环模型结构。首先建立电磁式微机械振动环陀螺的参数模型,从中获得影响陀螺仪灵敏度的因素,根据此因素对陀螺的参数进行优化设计,再采用有限元分析方法验证该陀螺模型的建立和设计方案是否可行。验证的结果表明了实测结果和理论计算结果基本相吻合,则证实该模型建立的正确性和设计方案的可行性。最终可得优化后该陀螺模型的参数分别为圆环半径r为4mm,厚度b为100μm,宽度a为40μm,支撑梁l1为600μm,l2为3.4mm,宽度b1为15μm,外加磁感应强度B约为0.3T,空气中的Q估计约为500,w约为5kHz,驱动振动幅度约为10μm。
关键词:振动环陀螺;结构模型;优化设计;灵敏度
The Design of a Simple Electromagnetic Gyroscope
Abstract: In order to improve the performance and optimization design of gyroscope, this paper presents a new type of vibrating ring structure model. Firstly establishing the parameter model electromagnetic micro-machined vibrating ring gyroscope, getting the impact of the gyroscope sensitivity, optimizing the design according to the parameters of the factors on the gyroscope, and then by using the finite element analysis method my paper verify whether the establishment and design scheme of the gyroscope model is feasible. Results show the measured results coincide with the theoretical results, confirming the correctness and feasibility of design scheme of the model. Finally the parameters of the gyroscope model after optimization respectively radius r is 4mm, the thickness of the b was 100μm, width a was 40μm, supporting beam of l1 was 600μm, l2 for 3.4mm, b1 width of 15μm, additional magnetic induction intensity of B is about 0.3T, the air Q estimation is about 500, w is about 5kHz, the driving vibration amplitude is about 10μm.
Key Words: Vibrating ring gyroscope; Structural model; Optimal design; Sensitivity
目 录
摘要 1
引言 2
1.振动环陀螺的工作原理 2
2.模型的建立 3
2.1振动环陀螺的参数模型 3
2.2电磁式振动环陀螺的结构模型 6
3.有限元仿真检测 8
4.结束语 9
参考文献 10
致谢 12,3099