PZT压电叠堆材料及其精密驱动器件工艺

摘要随着压电效应的发现，压电陶瓷中尤以 PZT 基压电陶瓷最为引人注目，是可用制作于精密驱动器件的优良材料。但随着工业的发展，单层压电陶瓷电压大、位移小的弊端日益突出，工程界将更多目光投向多层压电陶瓷。73789

本文主要介绍了低温共烧陶瓷（LTCC）技术制备多层 PZT 压电陶瓷驱动器的工艺探索过程，对所用的材料 0。25Pb(Mg1/3,Nb2/3)O3-0。75Pb(Zr0。52,Ti0。48)O3 进行了制样和性能测试并对制备的多层陶瓷驱动器进行了物相分析和显微形貌的分析。测得所用材料的压电常数 d33 为 344pC/N，相对介电常数 εr 为 4167，介电损耗 tanδ 为 0。01423，平面机电耦合系

数为 0。62；对该种材料所制样品进行了应变测试，证明该种材料在 1。5kV/mm 的电场下

即能产生 0。1%的应变。多层驱动器样品烧结性良好，无杂相引入。有较好的致密性和清晰的界面，但其压电性能不理想，需进一步改进工艺进行实验研究。

毕业论文关键词 PZT 压电陶瓷低温共烧技术多层陶瓷驱动器

毕业设计说明书外文摘要

Title Piezoelectric Stack Material and Its Precision Actuators

Abstract PZT ceramic materials have received the worldwide attention due to their high piezoelectric effect in the field of precise actuators。 But with the development in condense matter physics and industry requirements, a single layer of piezoelectric ceramic＇s piezoelectric behavior is not enough as there only small displacement with high voltage。 So scientists have shifted their concerns towards the multilayer piezoelectric ceramics。

This article focuses on the preparation of PZT multilayer ceramic actuators with low temperature co-firing ceramic (LTCC) technology。 0。25Pb(Mg1/3,Nb2/3)O3-0。75Pb(Zr0。52,Ti0。48)O3 material is used for performance testing。 Herein, the XRD analysis has proved that the fabricated multilayer ceramic samples are single phase and SEM micrographs have shown the compactness and clear interfaces of the samples。 It was observed that multilayered ceramics possess high

d33 of 344 pC/N, ε r of 4167, tanδ of 0。01423, of 0。62 and the strain test shows that the strain can reach to 0。1% at an applied electric field of 1。5kV/mm。Nevertheless, it can be stated that synthesized PZT multilayer actuator do not the ideal properties but these can be improved by further efforts。

Keywords PZT piezoelectric ceramics Low temperature co-fired ceramic Multilayer ceramic actuators

本科毕业设计说明书第 I 页

1 绪论 1

1。1 压电效应及压电材料 1

1。2 驱动器用 PZT 压电陶瓷 3

1。3 压电叠堆多层驱动器概述 6

2 压电材料的性能测试与表征方法 9

2。1 压电材料的性能测试 9

2。2 材料的表征方法 11

3 低温共烧多层 PZT 压电陶瓷驱动器 13

3。1 引言 13

3。2 PZT 多层陶瓷驱动器样品的制备 PZT压电叠堆材料及其精密驱动器件工艺:http://www.youerw.com/cailiao/lunwen_83488.html