MEMS技术QAl7铜合金原始组织对平面微弹簧挤压成形性能的影响

摘要微型平面弹簧作为MEMS重要的力学结构，已经成为研究热点。本文从MEMS技术重要性出发，探究微弹簧挤压成形过程中前期工艺不同而造成的微观织构不同对最终微弹簧性能的影响。本文自主设计了微挤压模具并成功挤压成形长度8mm，宽度6mm，厚度2mm的QAl7铜合金弹簧柱，经切割后可以获得厚度为0。5mm的微型弹簧。研究结果表明：采用温挤压能够大幅降低挤压载荷，提高弹簧柱成形质量；预处理中的轧制压下量和取向角度不同可以得到微观织构不同的坯料，同时对于挤压载荷、弹性系数、抗拉强度、显微硬度等力学性能方面存在影响。

毕业论文关键词 QAl7铜合金温挤压成形平面微弹簧

毕业设计说明书外文摘要

Title The impact of original organizations to the micro-extrusion of miniature flat spring

Abstract Miniature plane spring serves as an important mechanical structure in MEMS, has become a hot topic。 In this paper, I will start my study from the importance of MEMS technology as a start, and the different microscopic textures have different impact on the final properties of the micro-spring during preforming process caused by different micro-structure。 In this paper, We independently designed micro-extrution mould and successfully get QAl7 copper alloy spring posts of length 8mm, width 6mm, thickness 2mm, and once it can be cut to obtain a thickness of 0。5mm miniature spring。 The results show that: extrusion temperature can significantly reduce extrusion load, and increase the forming quality of spring posts; the rolling reduction and the orientation angle in earlier treatment have different impact on microscopic texture, and at the same time, it can cause different blanks for extrusion load, such as the elastic presence affect the mechanical properties coefficient, tensile strength, micro-hardness and so on。

Keywords QAl7 copper alloy; warm extrusion; miniature flat spring

1 绪论 1

1。1 MEMS简介 1

1。2 平面微弹簧 2

1。3 微成形技术 3

1。4 铝青铜简介及其优势 4

1。5 课题的研究目的、意义及主要内容 4

2 实验材料及方法 5

2。1 实验材料 5

2。2 坯料前期处理 6

2。3 微弹簧挤压成形 7

2。4 微观组织观察 8

2。5 力学性能测试 8

3 QAl7铝青铜微弹簧成形性能分析 10

3。1 挤压温度对弹簧柱成形质量的影响 10

3。2 微挤压成形挤压力-位移曲线 12

4 QAl7铝青铜平面微弹簧挤压成形性能分析 17

4。1 弹簧微观组织分析 17

4。2 QAl7铝青铜拉伸性能分析 19

4。3 铝青铜QAl7平面微弹簧显微硬度分析 20

4。4 铝青铜QAl7平面微弹簧的弹性刚度分析 21 MEMS技术QAl7铜合金原始组织对平面微弹簧挤压成形性能的影响:http://www.youerw.com/cailiao/lunwen_94593.html