氩气在电容耦合放电中特性参数的研究
时间:2020-12-20 11:02 来源:毕业论文 作者:毕业论文 点击:次
| 摘要： 本文简要介绍了气体及其辉光放电的原理和研究背景，以及等离子体技术尤其是在射频激发条件下放电的机理特性和实际应用。阐述了鞘层的基本理论，气体放电的基本模型和氩气在电容耦合放电条件下的电化学特性建立流体模型，列出了一般近似性的漂移扩散方程。再通过一维仿真模拟，用控制变量法改变各项参数值，进而绘出各参数随其他变量的变化图像，分析图像的曲线特点和变化趋势，得出各参数随横向位移，相位，外加电压和外加气压的变化关系，从而得到极板间的等离子体区域以及鞘层区域受外界条件影响下各参数变化特性。61102 毕业论文关键词：等离子体，鞘层，电容耦合放电 Title Research of characteristic parameters for argon capacity coupled discharge Abstract This article introduces the principle and background of gas and glow discharge. While mentions the mechanism of discharge characteristics and practical applications research of plasma technology, especially under the conditions of the RF excitation. Then describes the basic theory of the sheath, the basic model of the gas discharge of the capacitor coupled argon discharge conditions of the electrochemical properties of the fluid model is created, listing the general drift diffusion equation approximation. Then through a one-dimensional simulation, the control variable method to change the parameter value, and then draw the parameters with other variables change image, analyze the image of the curve characteristics and trends of the parameters obtained with the lateral displacement, phase, applied voltage and the relationship between the applied pressure changes, resulting in the plasma region between the plates sheath region affected by external conditions change characteristics under the influence of each parameter. 目录 1.引言.1 1.1等离子体物理的发展历史概况.1 1.2气体放电与辉光放电2 1.3射频激发下的等离子体研究背景3 2．理论以及模型6 2.1鞘层理论及特性6 2.2气体放电模型和及其建模6 2.3电容耦合放电求解过程7 3．模拟过程10 3.1各参数随坐标和相位的变化关系.10 3.2各个参数随电压的变化关系.15 3.3各参数随气压的变化关系.18 结论22 致谢.24 参考文献25
1.引 言 1.1 等离子体物理的发展历史概况 |