摘要本文实验均采用JGP-450型多靶磁控溅射仪制备一系列不同 W 含量的 TiWN 复合膜。利用 X 射线衍射仪、扫描电镜、摩擦磨损仪等实验仪器对 TiWN 复合膜的微结构，力学性能和摩擦性能进行研究。实验结果表明：TiWN复合薄膜是面心立方结构，薄膜沿TiWN(111)方向择优生长。在W元素含量高于15。01%时，开始出现了Ti2N相，并随着W元素含量的增加，Ti2N相的含量也增多；当W靶功率逐渐增大，W含量达到26。55%，W元素出现饱和，产生了单质相β-W。TiN薄膜的硬度为20。18GPa，并随着W元素含量增加的先增加后减少，在0~20%时，TiWN薄膜的硬度逐渐增加，在W含量为20%达到最大值，为35 GPa，在W元素含量大于20%时，硬度下降。在TiN薄膜中加入W元素能够加强薄膜与基体的结合力。随着W含量的增加，膜基结合力先增加后降低，但都是要比TiN薄膜的结合力要好。在W含量为8。82%时，膜基之间的结合力最强。TiWN复合薄膜的常温摩擦系数随着W元素含量的增加先减小后增加，TiN薄膜的摩擦系数为0。75， W含量在0~20%之间，随着W元素含量的增加摩擦系数逐渐减小，20%时摩擦系数最小值为0。45，这是由于具有润滑作用的WO3的含量在升高导致的；而W含量在高于20%时，由于薄膜的硬度在下降，薄膜的摩擦系数变大，W元素含量26。55%时，摩擦系数为0。51。86745

毕业论文关键词：磁控溅射；TiWN复合薄膜；力学性能；摩擦磨损性能

Abstract In this paper, experiments were performed using the CAS Shenyang Institute of Scientific Instrument Development Center production JGP-450 multi-target magnetron sputtering apparatus for preparing a range of different W content TiWN composite film。 The microstructure, mechanical and tribological properties of TiWN composite films were investigated by X-ray diffraction, nano indentation, CSM high temperature ball-on-disc tribo-meter and so on。 Under the experimental conditions Experimental results show that TiWN-Ag films have a fcc crystal structure with a (111) preferential orientation。 When W element content higher than 15。01%, began to appear Ti2N phase, And with the increase of W element content, content Ti2N phase also increased; When W target power increases, when W content at 26。55%, W element saturation, resulting in a simple substance phase β-W。 Hardness of the TiN film is 20。18GPa, and with the post-W element content increased, Hardness of the TiN film reduce after the first increase, At 0 to 20%, increasing the hardness of TiN film, The maximum hardness is 20% of W content。 when the W element content greater than 20%, the hardness is reduced。 With the increase of W content, the adhesion strength first increases and then decreases, But it is better than TiN film adhesion is better。 In the W content of 8。82%, the adhesion between the film and the substrate is the strongest。 W element was added in TiN film can enhance the binding force of the film and the substrate。 TiN film friction coefficient is 0。75, The normal Friction coefficient of TiWN composite film decrease first and then increase with the increase of W content,When W content is between 0 to 20%, Friction coefficient decrease with the increase of W content，the coefficient of friction in W content of 20% is 0。45; This is due to the increase in the content of WO3, The W content higher than 20%, the friction coefficient of the film increase, The friction coefficient W element content of 26。55% is 0。51。 The film that W content of 20% have a better coefficient of friction。

Keyword：Magnetron sputtering; TiWN composite films; mechanical properties; tribological properties

目 录

第一章  绪论 1

1。1 引言 1

1。2 表面涂层技术的研究现状与进展