摘要本论文采用多靶磁控溅射制备了Cr-Ti-N复合膜和Cr-Ti-V-N复合膜纳米多层，研究了不同Ti含量对Cr-Ti-N复合膜的微结构、力学性能和摩擦性能的影响；不同V含量对Cr-Ti-V-N复合膜的微结构、力学性能和摩擦性能的影响；研究结果如下：86747

对Cr-Ti-N复合膜的研究表明，随着Ti靶功率的改变, 在多弧离子镀膜机上制备了不同 Ti含量的Cr-Ti-N复合薄膜。并用各种实验器材对其进行了各项性能及微观组织的分析。结果表明:随着Ti含量的增加,粗糙度降低，沉积速率提高 。其微观组织相由 Cr-N类型结构转变为Ti-N和 Cr-N并存的混合相结构，随着时间的增加，其结构相转变成Ti-N类型结构；薄膜的择优取向发生了改变，由原来的(111)晶面慢慢的转变成(220)晶面。随着Ti元素含量的增加，薄膜的硬度增加的比较快，由实验数据可以得到，Ti原子质量分数大约在21。32时，薄膜硬度达到最高值，为23。172GPa。由于加入Ti元素后，使得薄膜硬度得以提高，这样就使得复合薄膜具有比单一薄膜有更好的耐磨性能。

对Cr-Ti-V-N复合薄膜的研究表明：无论V靶的功率如何增加，Cr-Ti-V-N复合薄膜的择优向都是(111)晶面，衍射峰相对于Cr-N衍射峰未发生偏移。随V靶功率的增大，薄膜的硬度呈逐渐下降的趋势，摩擦系数同时呈逐渐下降趋势。与Cr-Ti-N涂层相比，随着V元素含量的增加，硬度略微下降了大约2GPa，但摩擦系数从0。526降低至0。2694。

    得出的数据或以表格或以曲线的形式呈现在本文中特定的位置。经过分析我得到了影响成膜速率的因素的验证、Cr-Ti-N薄膜和Cr-V-N薄膜经摩擦磨损实验后的宏观图片，且对其产生原因进行合理的分析、两种薄膜的硬度及合理分析、两种薄膜的微观组织结构形貌。

毕业论文关键词: Cr-Ti-N复合膜；Cr-Ti-V-N复合膜；微结构；力学性能；摩擦性能

Abstract  In this paper, the use of multi-target magnetron sputtering of the Cr-Ti-N composite film and the Cr-Ti-V-N nano-multilayer composite film, the effects of different Ti content on the Cr-Ti-N composite film micro-structure, mechanical properties and Effect of friction performance; effects of different V content on the micro-structure of Cr-Ti-V-N composite film, mechanical properties and tribological properties; results are as follows: Of Cr-Ti-N composite film studies show that with the change of Ti target power in the multi-arc ion plating different Ti contents of Cr-Ti-N composite films were prepared。 And a variety of experimental equipment was carried out analysis of the properties and micro-structure。 The results show that: with the increase of Ti content, reduce roughness, deposition rate increases。 Its micro-structure phase consisting of Cr-N type structure into a mixed phase structure of Ti-N and Cr-N co-exist, with the increase of time, the structural phase transition into the Ti-N type structure; preferred orientation film has changed, (111) crystal plane slowly into the original (220) crystal plane。 With the increase of Ti content, the film hardness increased faster, from the experimental data can be obtained, Ti atomic mass fraction of about 21。32, the film hardness of the highest value for 23。172GPa。 Because after adding Ti element, so that the film hardness It can be improved, so that makes the composite film has better wear resistance than a single film。 

    Of Cr-Ti-V-N composite film studies indicate: V regardless of the target power increases, merit-based Cr-Ti-V-N to composite films are (111) crystal face diffraction peak with respect to the Cr-N diffraction peaks occur not biased shift。 With V target power increases, the hardness of the film showed a gradual downward trend, while the friction coefficient decreased gradually。 Compared with the Cr-Ti-N coating, V element content increases, the hardness decreased slightly by about 2GPa, but reduced the friction coefficient from 0。526 to 0。2694。