摘要本论文使用了JGP560复合型高真空多靶磁控溅射设备制备了TiMoN纳米复合薄膜，研究了不同Mo含量下的TiMoN复合膜的微结构、力学性能、摩擦磨损性能。

通过对低Mo含量TiMoN复合膜的研究可以得出以下结论：TiMoN薄膜为面心立方结构，择优取向为（111），薄膜主要为Mo在TiN中的置换固溶体。复合膜中的Mo含量与Mo靶功率基本上成线性关系，即随着Mo靶功率的升高，TiMoN复合膜中Mo原子的含量逐渐升高，反之Ti与N的含量却是随着Mo靶功率的提高而下降。TiMoN薄膜中的显微硬度随着Mo含量的升高先，升高到一定值然后下降，最高硬度为25。41Gpa，而对应的晶粒尺寸则是先下降再升高。随着Mo含量的升高，TiMoN复合膜室温下的平均摩擦系数逐渐降低，最小平均摩擦系数为0。33，这表明了增加Mo含量能使薄膜具有较低的磨损率，良好的耐磨性。相比于TiN的磨损率1×10-5mm2/N，TiMoN薄膜的耐磨性能优异，磨损率在1×10-6---1×10-8 mm2/N之间。86874

毕业论文关键词   TiMoN复合薄膜；显微结构；力学性能；摩擦磨损性能

ABSTRACT   TiMoN composite films were produced by reactive magnetron sputtering technique。 reaserched on their mechanical properties, friction and wear properties influenced by different Mocontent。

  Through the study of low Mo content TiMoN composite film can draw the following conclusions：TiMoN film face-centered cubic structure, preferred orientation of (111), TiN film mainly Mo in solid solution in the substitution。 Composite film Mo content of Mo target power substantially linear relationship, that with Mo target power is increased, TiMoN composite membrane content of Mo atoms gradually increased, whereas the content of Ti and N is the target with Mo power increases and decreases。 TiMoN film micro-hardness first increased with increasing Mo content to a certain value and then decreases,its greatest hardness value was 25。41GPa。And the corresponding grain size is decreased first and then increased。With the increase of Mo content, the average coefficient of friction at room temperature TiMoN composite film decreases, the minimum average coefficient of friction was 0。33, which indicates that the increase in Mo content makes the film has a low wear rate, good abrasion resistance。Compared to 1×10-5mm2 / N, the film is excellent in wear resistance TiMoN TiN wear rate, at 1×10-6 --- 1×10-8 mm2 / N between the wear rate

Keywords：TiMoN composite film  Microstructure Mechanical Properties   Friction and wear properties

目录

第1章 绪论 1

1。1引言 2

1。2纳米薄膜的种类、研究现状和发展方向 2

1。2。1 单元及多元纳米薄膜 2

1。2。2 多层薄膜 4

1。2。3 梯度薄膜 4

1。2。4 新型薄膜 5

1。3薄膜摩擦磨损理论研究 5

1。3。1摩擦理论 6

1。3。2 影响摩擦的因素 8

1。3。3磨损 8

1。4选题意义与研究内容 9

1。4。1 选题意义 10

1。4。2 研究内容 10

第2章 薄膜的制备与性能表征 10

2。1 引言 11

2。2 薄膜的制备方法与实验设备