摘要压电薄膜材料因为具有优异的压电特性和铁电特性越来越受到广泛关注。其中，锆钛酸铅薄膜因其自发极化特性和低介电损耗特征成为诸多电子器件的首选材料。本论文对锆钛酸铅(Pb(Zr,Ti)O3，PZT)薄膜的制备过程，工艺优化，结构表征，铁电性能进行了研究。87779

本文采用先进的脉冲激光沉积技术在石英基片上制备锆钛酸铅压电薄膜，并对其最优工艺进行讨论。利用原子力显微镜分析了其形貌，利用X射线衍射技术探究了其结构，利用铁电测试仪测试了其电回滞线。

由实验的结果可看出：所制备薄膜具有良好的铁电和热电性，在优化的条件下制备的PZT薄膜具有较好的表面形貌特征，和剩余极化强度。具备用于柔性器件的条件，有望在后续的研究中用于制造相关功能器件。

毕业论文关键词：柔性器件 PZT压电薄膜  脉冲激光沉积

毕业设计说明书外文摘要

Title      Flexible piezoelectric materials and devices     

Abstract Piezoelectric thin film materials have attracted more and more attention because of its excellent piezoelectric properties, ferroelectric properties。 Pb(ZrxTi1-x)O3(PZT) thin film has become the first choice for many electronic devices because of its spontaneous polarization and low dielectric loss。 In this paper, we have studied that the preparation process, process parameters optimization, structure characterization and the ferroelectric properties of Pb(ZrxTi1-x)O3 thin films。

Pb(ZrxTi1-x)O3 piezoelectric thin films were prepared on quartz substrates by advanced pulsed laser deposition technology, and the optimal process is discussed。 The morphology was analyzed by Atomic force microscope, and its structure was explored by X - ray diffraction technique。 The ferroelectric hysteresis loops were measured by a ferroelectric tester。

It can be seen from the experimental results that the films have good ferroelectric and thermal properties, and the PZT films prepared with the optimized conditions have better surface morphology and residual polarization strength。 It has the conditions for flexible devices, and be expected to be used for the manufacturing functional devices in the follow-up study。

Key words:  Flexible device   PZT piezoelectric thin film   Pulsed laser deposition

目   录

1绪论 1

1。1引言 1源-于,优Y尔E论W文.网wwW.yOueRw.com 原文+QQ752018`766

1。2压电效应机理 1

1。3锆钛酸铅简介 3

1。3。1 锆钛酸铅的结构 4

1。3。2 锆钛酸铅的相图 4

1。3。3 PZT材料研究现状及发展前景 6

1。4 本课题研究的目的及意义 7

2  实验原理 8

2。1薄膜生长的微观过程 8

2。2 脉冲激光沉积 9

2。3 X射线衍射技术 11

2。4 扫描探针显微镜 12

2。4。1原子力显微镜 12

2。4。2 压电力显微镜 14

3 实验过程 16

3。1靶材的制备 16

3。2薄膜的PLD生长 19

3。3 锆钛酸铅薄膜PLD工艺探究