摘要氧化锌作为一个宽禁带的半导体，它所制作的紫外光探测器在日常生活，工业，军事上都应用颇多，然而，对于纤维状可编织，便于人体穿戴的紫外探测器仍鲜有报道。本论文成功制备出基于氧化锌纳米棒阵列/石墨烯肖特基结的线状紫外探测器，有着柔性，360度探测，可编织，可穿戴等优点。本论文先将锌线表面用原子层沉积的方法沉积了一层氧化锌薄膜，继而用水热法生长出氧化锌纳米棒阵列。氧化锌纳米棒阵列结晶性好，排列整齐，阵列高度约3。5μm，纳米棒直径约为150nm。成功转移石墨烯，形成大面积连续的薄膜，然后将其包裹住到氧化锌阵列的表面，与其形成肖特基结接触，并充当透明电极的作用。组装好器件后，对其探测器性能进行表征，I-V曲线展现出其肖特基结特性，并且对光照有响应。I-T曲线看出了其明暗电流比为1。5，上升时间为1。5s，并且响应度曲线说明了其在300-380nm波段有响应，是典型的日盲型探测器。做出有效的器件后，对氧化锌纳米棒阵列的生长方式进行优化，采用热处理锌线的方式长出的阵列质量更优，而且相同条件下，明暗电流比为4。5，是原先的3倍，上升时间为0。5s，降低至是原先的1/3，大幅提高了其探测性能。87812

毕业论文关键词  氧化锌纳米棒  石墨烯  紫外光探测器

毕业设计说明书外文摘要

Title  Monolayer Graphene/ZnO Nanorods Array Schottky Junction as Wirelike Ultraviolet Photodetectors     

Abstract Zinc oxide (ZnO), with a direct wide-bandgap (∼3。4 eV) used as ultraviolet detector has a lot of industry and military applications in daily life。 However, it is rarely reported about fibrous ultraviolet detector that can be knitted and easy wearable。 In the dissertation, Schottky junction linear UV detectors based on the ZnO nanorods array have been prepared successfully, and it is flexible, 360 degree detection, can be woven and wearable。 Firstly, a layer of ZnO thin film was deposited by using atomic layer deposition on the surface of Zinc wire, and then the ZnO nanorods array was grown by hydrothermal synthesis。 ZnO nanorods array is well arranged and has good crystalline property, the height of array is about 3。5μm, the diameter of the nanorods are about 150nm。 We transferred the graphene and a large area of continuous thin film is forming，then wrap it to the surface of the ZnO nanorods array。 So it formed a Schottky junction and it act as a transparent electrode here。 After the device was assembled, the I-V curve graph shows its Schottky junction characteristics, and the photo response to the light is also shown。 The I-T curve graph shows that the light-dark current ratio is 1。5 and the detector response time is 1。5s。 Moreover, the response curve shows that it has photo response in the 300-380nm band。 It is a typical solar-blind ultraviolet (UV) detector。 After making an effective detector, we try to change the growth mode of the ZnO nanorods array to improve the performance。 The quality of ZnO nanorods array is much better when used the heat treatment。 Then we can see in the same condition ,the light-dark current ratio is 4。5 which is three times of the original and the response time is 0。5s which reduced to 1/3。 Obviously, the performance of the ultraviolet detector greatly improved。 

Keywords  ZnO nanorods array, Graphene, Ultraviolet photodetectors

目  次

1  绪论 1

1。1  氧化锌 1

1。1。1  氧化锌介绍 1

1。1。2  氧化锌结构 1

1。1。3  纳米氧化锌的制备