双频激光干涉仪信号处理与验证卡设计规划与测试
本文为双频激光干涉仪的研发项目设计项目功能需求说明书。此说明书主要供项目设计人员和软件开发人员使用，规划了双频激光干涉仪软硬件功能要求、性能指标如量程范围、采样周期等。此说明书为后续项目开发的各项步骤如系统的硬件设计，软将程序编写等提供依据，为系统功能和性能上的审核提供标准。
本文为双频激光干涉仪的研发项目规划高速传输协议。通讯传输协议均以帧为单位。串口通讯协议包括两种帧：命令帧(CmdFM)，响应帧(ResFM)。协议可对计数卡做出读取、更改、保存设置等命令并依据协议对命令做出响应。光纤传输通讯协议包括三种帧：触发帧（TTC-FM）,应答帧（ATC-FM）,数据帧（DatFM）。数据帧传输测量数据；应答帧在接收到数据后向发送方发出接收应答，并反馈当前状态信息；触发帧用于向应用层提供实时的触发信号。EtherCat传输协议帧主要依据以太帧为原型对其简化，大致功能与串口通讯帧相同，包括两种帧：命令帧(CmdFM)，响应帧(ResFM)。帧内包含对应设备的地址、数据长度等信息。
本文为双频激光干涉仪的研发项目规划硬件工作框图，主要依据项目的工作原理并根据硬件主要模块的功能需求，对项目的光路部分和电路部分的整体工作做出了大致的流程框架图。
毕业论文关键词：双频激光干涉仪；高速传输协议；功能需求；HSSL光纤传输；EtherCat
Abstract Dual-frequency laser Interferometer adopts heterodyne interference measurement principle。It has lots of advantages,like low noise,anti-environment interference,allowing light source multiplexing channels and so on。IDual-frequency laser Interferometer is one of the current high-precision,large measurement range,ultraprecise length measuring instrument。In displacement measurement with nanoscale or sub-nanometer,Dual-frequency laser Interferometer is widespread used for sophisticated manufacturing and measurement area,like semiconductor fabrication,high-grade control machine tool and so on。
Dual-frequency laser Interferometer especially plays a very important role in ultra precision Dynamic displacement measurement with Nano-resolution。It is a core sensor,which can achieve the ultra precision kinematics accuracy of six-freedom motion platform to feedback。This paper ,according to the 《graduation project mandate》,complete the relevant design and planning work of the signal processing module ,based on VPX-backplane bus, and the HSSL optical Fiber and EtherCat high speed transmission verification module,based on PCIX-bus,of Dual-frequency laser Interferometer。
This paper designs and completes the project functional requirement specification。This specification is for project designer and software developer to use。It plans the various functional requirements,performance index of Dual-frequency laser Interferometer,like rang limit,sampling period and so on,in detail。 This specification provides the evidence for the following project developing steps,like project circuit design,software programming;provides the standard for the checking of system functions and performances。
This paper designs the high-speed transport protocol。Transport protocol is in units of frames。Serial communication protocol has two kinds of frames,included:PC—>counting card command frame(CmdFM) ,counting card—>PC response frame(ResFM)。CmdFM is based on frameNumber as a difference to make commands to counting card like reading,change,save settings。According to the trotocol,ResFM make the corresponding actions to response the CmdFM。HSSL optical fibre transmission communication protocol has three kinds of frames,included:PC—>counting card trigger frame(TTC-FM),PC—>counting card response frame(ATC-FM),counting card—>PC data
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