摘要移相干涉术是一种高测量精度、高灵敏度、高空间分辨力的非接触式的光学测量方法。但也正因为它的高测量精度和灵敏度，环境振动对它的影响很大。其测量误差的主要来源之一就是环境振动。本文关键在于介绍其抗振技术的研究进展和它所存在的问题，并在深入了解干涉原理及干涉图的原理后，利用光电传感器作为光电探测器件来进行干涉条纹的抖动量的测量。本文所设计的系统由PSD、电流-电压变换电路、运算放大电路以及单片机组成。系统根据PSD光敏面上干涉条纹的位置的变化来输出不同的电流，然后通过单片机来显示条纹的移动量以及方向，从而给以后的振动补偿提供数据。我们选用51S单片机作为开发板，利用STC89C54型号的单片机芯片来实验。经过测试，该系统对100Hz以下的振动反应是很灵敏的。63704

毕业论文关键词  移相干涉  抗振  PSD   单片机  STC89C54

毕业设计说明书（论文）外文摘要

Title     The development of measurement system of light  spots jitter based on PSD   

Abstract

Phase-shifting interferometry (PSI), as a high-precision,high-sensitivity,high-spatial resolution non-contact optical measurement method, has been widely used in physical measurement with the optical path difference parameters.But also because of the high- precision and high-sensitivity reasons,it is vulnerable to the impact of environmental vibration,ambient vibration is a major source of phase-shifting interferometer measurement error.This paper focuses on the phase-shifting interferometer vibration technology progress and problems.And in-depth understanding of the interference principle and the interference pattern on the basis of the choice of the optical position sensor(PSD) as a photodetector,to detect the interference fringes jitter. By the PSD, the current - voltage conversion circuit, operational amplifier circuits and single chip. The system output different current based on interference fringes in the PSD photosensitive surface of the position change. The fringe shift amount and direction of the single-chip processing, in order to provide useful data to the subsequent vibration compensation.Here,I select 51S microcontroller development board,with the SCM chip,is STC89C54.After testing,the system for vibration below 100Hz.

Keywords: phase-shifting interferometer, active anti-vibration, PSD, SCM,STC89C54.

1  绪论 1

1.1 课题研究背景 1

1.2 本论文的主要工作 2

2  干涉原理 3

2.1 光波干涉的条件 3

2.2  干涉条纹的可见度 4

2.3 双光束干涉系统和多光束干涉系统 6

2.3.1  典型的双光束干涉系统 6

2.3.2  多光束干涉——F-P干涉仪 7

2.4  移相干涉测量基本原理 9

2.4.1 移相干涉测量基本原理 9

2.4.2振动对移相干涉的影响 10

3  实验系统设计 11

3.1 条纹检测电路设计 12

3.1.1 PSD光电探测器 13

3.1.2  I/V转换放大电路 13

3.1.3  低通滤波电路 14

3.1.4  加减法电路