摘要光学自由曲面在校正各类相差的同时可以简化光学系统的结构，显著提升光学系统性能，受其自由度影响使得高精度加工和检测变得十分困难。倾斜波面干涉法是目前测量非球面、自由曲面光学元件面形的有效方法之一。倾斜波面干涉法通过引入多束具有不同倾角的球面波，补偿被测元件表面局部区域的梯度，减小局部区域的干涉条纹密度以实现对梯度变化较大光学元件的面形测量。准直透镜组和标准球面透镜组作为倾斜波面干涉系统的重要组成部分是否符合设计要求对系统的测量精度产生重要影响。本项目通过对准直透镜和标准球面透镜装调时容差对波面误差的影响大小进行分析，设计具有多个自由度能调节镜片中心和空气间隔的镜片装夹结构，设计能高精度装校大口径标准球面补偿透镜组的装校方法，对用于倾斜波面干涉仪的准直透镜组和标准透镜组装调，实现波面误差的有效控制。77165

毕业论文关键词  倾斜波面干涉；光学自由曲面；镜筒设计；装调

毕业设计说明书外文摘要

Title  Assembly technology research of the collimating lens group and the standard spherical lens that used to tilt wave-front interferometer                     

Abstract Optical surface at the same time in the correction of all kinds of difference can simplify the structure of the optical system, significantly improve the optical performance of the system, affected by the degree of freedom makes high precision machining and testing become very difficult。 Oblique wave interference method is the measurement of aspheric surface, one of the effective methods of free-form surface optical component surface shape。 Oblique wave interference method by introducing multiple beam spherical wave with different Angle, the compensation on the surface of tested the gradient of local area, reduce the local interference fringe density gradient to achieve large optical component surface shape measurement。 Collimating lens group and the standard spherical lens group as an important part of oblique wave interference system meets the design requirements of system measurement precision influence。 This project through the lens of aligned straight and standard spherical lens with adjustable tolerance analysis of the influence of the wavefront error size, design with multiple degrees of freedom can adjust the lens center and air interval lens clamping structure, the design can be compensated equipped with high-precision school of large diameter standard spherical lens group of loading method in the school, for oblique wave interferometer the collimating lens group and the standard lens assembly, realize effective control of wavefront error。

Keywords  Oblique wave interference; Optical free surface; The tube design; With adjustable

目   次

1  绪论1

2  倾斜波面干涉法和装置构成 3

2。1  倾斜波面干涉仪构成  3

2。2  梯度补偿透镜组  3

3  准直透镜组与标准球面透镜组容差分析 5

3。2  点光源在光轴外  19

4    镜筒设计和镜头装配方案  35

4。1   镜筒设计  35

4。2  镜头装配方案  44

结论  47

致谢  48

参考文献49

1  绪论

近年来，超精密加工技术迅速发展，可以实现光学自由曲面的加工，该面型由于具有极大的自由度，不仅能最大程度的简化系统结构，实现集成化，还能最大限度的提高和改善系统性能，开始成为新一代光学元件。在汽车拉伸模型、注模、轮机叶片、舰船螺旋桨及各种玩具成型塑料模等领域应用日益广泛。虽然自由曲面在光学系统中有很多的优点，但是由于光学自由曲面面型的特殊性，其自由度大很难检测。[1]论文网