摘要便携式激光干涉仪常用于光学元件的在线检测，由于采用波长调谐，且受环境振动，会产生不等间隔移相，为避免现行的目视法存在的主观性和偶然性，提高检测效率和质量，课题提出了一随机移相算法——正交分量分析（QCA）法。79008

正交分量分析法是基于主元素分析的异步移相算法，该算法无需迭代和非线性优化，计算速度快，且不受解调相位的动态范围和条纹数量限制的影响，但存在全局相位符号不确定性问题。

对于仿真所得干涉图，用QCA算法解得的相位与原相位差值的RMS值可达到0。01λ，优于现行的目视法。用于便携式干涉仪实际检测时，计算结果较优，但恢复波面存在波纹，虽在实验中已得到改善，但仍未完全解决，具体原因仍有待探究。

毕业论文关键词  便携式激光干涉仪 光学在线检测 随机移相算法 正交分量分析

毕业设计说明书外文摘要

Title       Research on random phase shift algorithm applied in portable laser interferometer     

Abstract The portable laser interferometer is always used in on-line detection of optical elements。 Because of using wavelength tuning, and the presence of vibration, the phase shift is unequal。 To avoid the subjectivity and chance of artificial interpretation, and improve the speed and quality of detection, we proposed a random phase shift algorithm that Quadrature component analysis。

Quadrature component analysis is an asynchronous phase-shifting algorithm, which is based on principal component analysis。 The method does not require iteration or non-linear optimization, so it computes very fast。 Additionally, it is not affected by the number of fringes limitation, but it has the indetermination in the global phase sign。

We test Quadrature Component Analysis algorithm with simulated interferograms, getting the results that the RMS of the difference between the phase computed and the original phase can reach to 0。01λ, which is better than the current artificial interpretation。 When the algorithm is used in portable interferometer for actual test, the results are good。 However, the retrieved wavefront has ripples, in experiment, it has been improved, but still not fully resolved, the specific reasons is reserved  to be explored。

Key words portable laser interferometer  optical on-line detection  random phase shift algorithm  Quadrature Component Analysis

目    次

1 绪论 1

1。1 研究背景及研究意义 1

1。2 国内外的研究现状 2

1。3 主要研究内容 4

2 便携式激光干涉仪系统 5

2。1 便携式激光干涉仪介绍 5

2。2 波长调谐移相原理 6

3 正交分量分析算法 8

3。1 正交分量分析算法概括 8

3。2 正交分量分析算法理论 8

3。3 正交分量分析算法仿真 11

4