摘要：盖玻片是盖在载玻片与被观测物体上的极薄的玻片，以避免液体和物镜相接触进而污染物镜。盖玻片属于一种透明薄片，它的厚度一般规定为0.17mm，故对其厚度进行准确测量是必要的。本文研究了基于迈克尔逊干涉仪，利用白光干涉法精确测量盖玻片厚度的原理算法。首先利用钠光定标以确定条纹间距和像素间隔之间的关系，进而利用白光干涉来测量中央零级黑条纹的移动量，由此精确获得迈克尔逊干涉仪中动镜的微小位移量。对于钠光条纹图，通过利用逐行高斯滤波变换，进而利用多项式拟合和条纹极值点自动搜索等方法得到条纹间距与像素之间的换算关系；而对于白光干涉条纹图，则利用条纹平滑、设定限定性阈值消除个别奇异极值点和各行平均等方法得到中央零级黑条纹移过的像素间隔，由此最终精确得到动镜的位移量和盖玻片厚度结果。程序算法综合利用了图像处理、最小二乘拟合、条纹极值点自动搜索等技术。实验测得的结果为0.1789mm。实验结果表明，本文基于白光干涉测量盖玻片厚度的原理算法是准确可靠的。65264

毕业论文关键词： 迈克尔逊干涉仪；白光干涉测量术；干涉测量术；图像处理；盖玻片；薄膜

毕业设计说明书（论文）外文摘要

Title  Measurement of the thickness of the cover slip by using Michelson interferometer

Abstract

The coverslip is built on the slide and observed thin objects on the slide, so as to prevent liquid from contacting the lens thus polluting them. Coverslips belong to a transparent sheet, the thickness of the general provisions being 0.17mm, so an accurate measurement of their thickness is necessary. This paper studies the Michelson interferometer based on the principle of algorithm, accurate measurement by white light interferometric coverglass thickness. First, by using sodium light calibration to determine the relationship between the fringe spacing and pixel interval, then use the white light interferometry to measure the movement of the central zero-order black stripes, the precision of Michelson of small displacement of the moving mirror interferometer. For sodium light pattern, through the use of progressive Gauss filter transform, and then using polynomial fitting and fringe extremum point automatic search method to get the conversion relationship between the fringe spacing and the pixel; and the white light interferogram fringe, using smooth, set defined threshold to eliminate inpidual singular extreme point and the average method to get the central zero black stripe over the pixel interval, thus finally obtained accurately mirror displacement and the cover glass thickness. The program algorithm using image processing, least square fitting, fringe extremum point automatic search technology. The experimentally measured results for 0.1789mm. The experimental results show that, this algorithm based on white-light interference measuring glass thickness is accurate and reliable. 

Keywords: Michelson interferometer; White light interferometry; Interferometry; Image processing; Coverslip; Film.

目次

1. 引言 2

1.1 研究背景 2

1.2 薄片与薄膜厚度测量方法综述 2

1.3 本文采用的方法及所做的工作 8

2. 实验原理与实验仪器 10

2.1 迈克尔逊干涉仪基本结构与工作原理 10

2.2 白光干涉法测量盖玻片厚度原理 11

3. 实验步骤与数据处理 11

3.1 调节步骤