SIMULINK硅微机械陀螺仪结构参数评估与测试技术+程序+电路图
毕业论文关键词 MEMS陀螺仪 品质因数 正交误差 SIMULINK
Title Study on MEMS gyroscope structure parameters evaluation and testing technology
Abstract Silicon micromachined gyroscope is a miniature inertial sensor with small size, light weight, low cost and consumption, high reliability, which has shown broad application prospects in the areas of commercial and defense military. Due to the MEMS processing characteristics, the same batch of silicon micromachined gyroscope performance may be uneven. So a fast and efficient structure parameters evaluation and testing technology is needed. MEMS Inertial Technology Research Center of of Science and Technology developed the dual-mass micromachined gyroscopes, which is studied in this paper. The working principle and the driving process of the gyroscope are studied. A best solution is selected from several options to measure the quality factor and resonant frequency. Then the data is captured and analyzed following the testing circuit designing. The sources of coupled errors are studied and measured along with structural capacitors. Finally, a dynamic system model is created in SIMULINK according to the measured parameters. Some previous conclusions are verified based on the model, which also lead to the estimation of coupled errors. Keywords MEMS Gyroscope Quality factor Quadrature errors SIMULINK
目次
1.绪论.1
1.1背景及研究的意义1
1.2MEMS硅微机械陀螺仪的基本原理及分类..1
2.硅微机械陀螺仪驱动过程分析...3
2.1硅微机械陀螺仪的结构3
2.2硅微机械陀螺仪的动力学分析..3
2.3静电驱动力的求解4
2.4驱动方向的运动速度..6
2.5检测方向的位移..7
2.6本章小结8
3.品质因数和谐振频率测试...9
3.1品质因数和谐振频率的测试原理9
3.2激励和检测方法.11
3.3测试过程...13
3.4数据处理...17
3.5测试结果分析...26
4.陀螺的结构电容测试..27
4.1电容测试原理...28
4.2测试过程...30
5.正交误差的测试..32
5.1耦合误差的来源.32
5.2测试过程...34
5.3测试结果及分析.34
6.硅微机械陀螺仪的动力学仿真..36
6.1驱动模态系统模型...36
6.2检测模态系统模型...36
6.3系统仿真...37
7.总结与展望..41
致谢42
参考文献43
附录一：MEMS陀螺仪开环测试板电路原理图45
附录二：求解MEMS陀螺品质因数及谐振频率的数据处理程序..49
1. 绪论 1.1 背景及研究的意义 MEMS 是微机电系统（Micro-Electro-Mechanical Systems）英文缩写，它是融合多种微细加工技术，并应用现代信息技术的最新成果而发展起来的高科技前沿学科。硅微角速率传感器，即 MEMS 硅微陀螺仪，是一类用于测量运动物体姿态或转动角速度的传感器。 无论是在军事还是民用领域，都可以发挥巨大的作用。硅微角速率传感器具有重量轻、体积小、成本低、可靠性高、可批量生产、易于与电子线路集成等等优点，使其在高精度炮弹的惯性导航系统、小型卫星和航天器制造等军用领域及汽车防滑刹车系统、安全气囊和自动调整系统、卫星导航、摄影器材、医疗器械等军民用领域均有着广泛的应用前景。 由于 MEMS 硅微机械陀螺仪加工方式（沉积和蚀刻）的特点，同一批次加工出的陀螺仪的参数有较大的差异，因此需要一种快速可靠的参数测试方法进行陀螺的初步筛选，需要初步测试的参数有：驱动及检测模态的品质因数 Q 和谐振频率 Fx；源]自{优尔^*论\文}网·www.youerw.com/ 各个结构电容的值：驱动电容 Cd+、Cd-，驱动检测电容 Cds+、Cds-，检测电容Cs+、Cs-；陀螺仪驱动（x方向）和检测（y方向）的正交误差。最后，根据已测得的参数，建立系统动力学模型，利用 simulink仿真并验证。