基于FDTD的掩模基底缺陷偏振态研究

摘要应用FDTD Solutions软件进行仿真分析光学掩膜基底缺陷的偏振态测量，设置高斯光源照射时，在193nm条件下产生雾状缺陷。通过FDTD Solutions软件建立模型模拟不同状态的缺陷，通过设定网格精度等条件研究远场电场矢量s和p分量的电场分布来分析偏振态，进而研究不同大小和形状的掩膜基底缺陷形态。FDTD算法基础为时域有限差分法，将电磁场空间和时间进行离散，将麦克斯韦方程网格化，对偏振状态研究提供了诸多方便。结合理论分析，仿真分析了三种不同形状相同大小的缺陷以及两种相同形状不同大小的缺陷，数据拟合偏振状态的振幅和相位结果，观察计算出不同形状和不同尺寸的缺陷对偏振态的影响，观察到缺陷的形状和大小都会对偏振状态的产生不同的影响。在三文空间中解读远场电场分布，为偏振态提供了更精确的数据分析。26422
关键词：FDTD Solutions软件偏振时域有限差分法
毕业论文设计说明书外文摘要
Title The study of the polarization of the defect of the mask substrate based on FDTD method
Abstract
Application of FDTD Solutions is the software for simulation analysis of polarization measurement of the optical mask substrate defects,which sets the Gaussian light source, producing a haze in 193nm conditions, to simulate different defects by the state model of FDTD Solutions software, and then software sets the grid resolution and other conditions to study vector components s and p of the far-field electric field, which analyzes polarization distribution,to study different sizes and shapes of the defects of the mask substrate form.FDTD method is based on Finite-Difference Time-Domain,discreting the electromagnetic space and time field, meshing the Maxwell equations, providing a lot of convenience to the polarization state of the study.According to the theoretical analysis, simulating different types of defects：three different shapes and the same size and two different sizes and same shape,fitting the amplitude and phase results of data, the impact of different shapes and different sizes of defects on the polarization state is calculated. The interpretation of the far-field electric field distribution in three dimensions , providing more accurate data analysis for the polarization state.
Keywords FDTD Solutions Software , polarization , Finite-Difference Time-Domain method
目   次
1 绪论   1
1.1 掩膜基底缺陷偏振态研究意义   1
1.2 光偏振态测量原理   1
1.2.1 锥形衍射   1
1.2.2 斯托克斯-穆勒公式   2
1.3 FDTD method应用背景   3
1.4 国内外研究现状   3
1.5 本论文研究方向和任务   4
2   FDTD method基本理论   6
2.1 FDTD method简介   6
2.1.1 有限差分的概念   6
2.1.2 FDTD method原理简介   7
2.1.3 FDTD method应用优点   13
2.2   FDTD仿真的精度分析   15
2.2.1 FDTD方法的数值稳定性分析   15
2.2.2 FDTD方法仿真的吸收边界   17
3   FDTD solution软件简介   18
3.1 软件简介   18
3.2 软件使用   19 基于FDTD的掩模基底缺陷偏振态研究:http://www.youerw.com/wuli/lunwen_20607.html