静电力作用下微梁的变形及仿真

摘要静电力作为微机电系统（MEMS）中一种典型的驱动力，在微机电系统中得到了相当广泛的应用。由于对静电驱动微器件相关特性的研究尚不够成熟，还未能形成一整套合理的设计方法，导致静电驱动MEMS产品开发周期长，成品率低、可靠性差等一系列问题。本文以电磁场、材料力学、数值方法等理论为基础，并辅以计算机仿真手段，对静电驱动微梁的静电力、静力学等方面问题进行了深入的研究，并建立了求解静电驱动微梁的系统仿真模型。67199

文中分别建立了静电驱动悬臂梁和两端固支梁的静力学控制方程和有限元模型，通过解析方法和数值求解，得出静电驱动微梁的变形及其特性。探讨了静电驱动微结构中特有的吸合效应。引入小变形假设进行简化，提出了计算静电力作用下微梁变形的解析公式，并分析了用小挠度变形理论计算微结构变形的合理性。

毕业论文关键词 MEMS 静电力微梁有限元小挠度理论

毕业论文外文摘要

Title Electro-statically actuated micro-beam deformation and Simulation

Abstract

Electro-static force as the typical driving force in the MEMS has been widely used. Because of the characteristics of electro-statically actuated micro-devices related research is still not mature enough to form a complete set of rational design methods, resulting in electro-statically driven MEMS products’ long development cycle, low yield, poor reliability issues. In this paper, electro-static field, elastic mechanics, numerical calculation of the theoretical basis of computer simulation as an auxiliary tool for the study of electrostatic actuation Typical microstructures established and solved electro-statically driven micro-beam the system simulation model.

In the paper we established electro-static cantilever and clamped Beam dynamics equations and finite element models, through analytical methods and numerical solution we obtained micro-beam deformation under static electricity and their characteristics. We explored the elastic force of the microstructure and static electricity generated by the coupling effect of pull. Based on small deflection theory, a method for calculating deformation of electro-statically actuated micro-beam analytical formulas, and analyzed if the small deflection theory is reasonable.

Keywords MEMS electrostatic force micro-beam finite element theory small deflection theory

1 绪论 1

1.1 微机电系统 1

1.2 微机电系统多场耦合 2

1.3 静电力和静电驱动微器件 3

1.4 静电驱动微结构的研究现状 4

1.5 本文研究的目的和意义 5

1.6 本文的主要工作 5

2 微结构的静电力 6

2.1概述 6

2.2平行板电极间的静电力 7

3 静电驱动微结构的静力分析 9

3.1 概述 9

3.2 基本假设 9

3.3 静电驱动的特性——吸合效应 9

3.4 静电驱动微梁的静力静电力作用下微梁的变形及仿真:http://www.youerw.com/wuli/lunwen_75316.html