摘要近些年，随着微制造工艺与微机械技术的发展，特别是半导体制造、船海工程、 航空航天技术的发展，低频微小振动的测量成为科学研究和工业发展亟待解决的问 题。目前测量振动的方式主要有三种：机械式测量技术、电气式测量技术和光学式 测量技术，考虑到光学式测量技术具有精度高、抗电磁干扰等优点，因此成为现代 测量的首选。83937
本文基于微环谐振器的谐振原理与弹光效应，对低频微小振动的检测方法进行 了仿真研究并进行了简要的分析。文中首先对课题的研究背景、研究现状以及论文 主要工作进行了介绍，简单地介绍了微环谐振器的基本原理及相关参数。在此基础 上，对微环测振系统的原理、光学设计进行详细分析。最后对测振系统进行仿真分 析，得到微环谐振器的谐振波长与折射率的关系，结合系统模型分析，得到谐振波 长与加速度的关系。
结果表明，谐振波长随加速度的增加而增大，同时可以分析谐振波长得到加速 度的具体数值。
毕业论文关键词：微环谐振器；振动测量；时域有限差分法(FDTD)
Abstract In recent years, with the development of micro manufacturing technology and micro mechanical technology, especially the development of semiconductor manufacturing, ship and ocean engineering, aerospace technology, the measurement of small low-frequency vibration become problems urgently to be solved in scientific research and industrial development。 Recently, there are three kinds of vibration measurement: mechanical measuring technology, electrical measurement technology and optical measurement technology。 Taking into account of the advantages of optical measuring technology, it has become modern measurement of choice。
Based on the principle of micro ring resonator and the optical effect, the detection method of low frequency micro vibration is simulated and analyzed in this paper。 Firstly, the research background, status and the main work of this paper are introduced。 Secondly, the basic principles and related parameters of the micro ring resonator are introduced briefly。 On this basis, the principle and design of optical micro ring vibration measuring system are analyzed in detail。 Finally, through the simulation analysis on vibration system, the relationship between wavelength and the refractive index can obtained。 Combined with the analysis of the system model, we get the relationship between the resonant wavelength and the acceleration。
The results show that the resonant wavelength increases with the increase of the acceleration, and the specific value of the acceleration can be analyzed at the same time。 Keywords: Micro ring resonator; vibration measurement; finite difference time
domain method(FDTD)
目录
第一章 绪论 1
1。1 课题研究的目的和意义 1
1。2 振动测量技术的研究现状 2
1。2。1 目前振动测量的几种方法 2
1。2。1 目前振动测量存在的问题 4
1。3 本文的主要内容 4
第二章 微环谐振器的原理 6
2。1 微环的基本原理 6
2。1。1 微环的基本原理 6
2。1。2 微环的基本参量 7
2。2 微环的结构 9
2。2。1 微环的基本结构 9
2。2。2 微环的拓扑结构 FDTD低频微小振动检测的微环谐振器设计:http://www.youerw.com/zidonghua/lunwen_99223.html