双激发源阴极弧蒸发制备碳基合金化超硬膜材料

摘要类金刚石（DLC）薄膜是一种新型碳材料，是同时含有金刚石相和石墨相的非晶碳。DLC膜有很多优良性能，比如硬度高、透光性能好等。DLC薄膜现已被广泛应用于机械、生物医学、光学等领域。但是，在应用过程中，膜层表现出的缺陷，比如内应力大、热稳定性差、脆度高等，严重影响了DLC薄膜的正常使用。因此，科研人员通过异质元素掺杂、构建过渡层、退火等一系列改性方法来缓解薄膜的内应力，提高膜-基附着力，改善薄膜机械力学、摩擦学行为等。78766

本文主要研究在DLC薄膜中掺杂金属Cr后性能和结构的变化情况。采用的制备技术是双激发源阴极弧蒸发法，以单晶硅和316L不锈钢片为基底，成功沉积了Cr元素掺杂的DLC薄膜。通过Raman、XPS、AFM表征手段分析观察薄膜的结构、元素组成以及表面形貌。再分别用纳米压痕仪和台阶仪测量薄膜的硬度值和弹性模量值、厚度以及内应力。并对薄膜的润湿性能和抗腐蚀性能进行了研究。

毕业论文关键词 DLC膜 Cr掺杂电弧蒸发结构性能

毕业设计说明书外文摘要

Title Preparation of carbon based alloy material superhard films by evaporation of double excitation source cathode arc

Abstract DLC film is a new type of film material，composed by diamond phase and graphite phase。 It has many excellent performance, such as high hardness, low friction coefficient, and good light transmission。 It can be widely used in mechanics, optics, electronics, biomedical and many other fields。 However, in the process of application, the defects of DLC films like high internal stress and thermal stability weaken its performance and lifetime。 To improve these detects, researchers have done a lot of studies and found methods, including doping heterogeneous elements, using interlayer film，annealing treatment, witch all can improve the performance effectively。

This paper focus on the effects of Cr doping on the structure and properties of DLC films。 The films are deposited by the different arc evaporation technology。 The pulse cathodic arc generator can be used to evaporate graphite target to prepare DLC films。 Raman, XPS, AFM and SEM were operated to analyze the phase microstructure, element content and surface morphology, respectively。 Nano indenter, atomic-Profiler, friction-abrasion testing machine were used to measure the hardness and elastic modulus, thickness and the internal stress， respectively。 Also the wettability and corrosion resistance were tested。

Keywords DLC films；Cr doping；Arc evaporation；Structure and properties

1 引言 1

1。1 类金刚石薄膜简介 1

1。2 DLC薄膜的结构与性质 1

1。3 DLC薄膜的制备方法 1

1。3。1 化学气相沉积法 1

1。3。2 物理气相沉积法 2

1。4 DLC薄膜缺陷 2

1。5 性能改进 3

1。5。1退火 3

1。5。2 掺杂 3

1。5。3多层膜 3

1。6 本文的研究目的与内容 3

2 实验部分双激发源阴极弧蒸发制备碳基合金化超硬膜材料:http://www.youerw.com/cailiao/lunwen_90855.html