摘要移相干涉技术（PSI）因其高精度和高灵敏度，特别适用于三维形貌的测量工作。它采取非接触式的测试手段，广泛应用于各种物理量的检测中，是进行高精度光学实验的重要手段之一。
移相干涉技术通过反正切函数的作用，将被测元件的真实相位包裹在的区间范围内，形成压包波面。然后，通过某些算法对压包波面进行相位解包操作，就可以获取原始的相位值。本文将解包算法分成路径跟踪算法和全局展开算法进行介绍，分别通过介绍路径跟踪法中的基于可靠度导引的相位解包算法和全局展开法中的加权最小二乘算法和无加权最小二乘算法来了解其原理和解包方法。
最后用MATLAB软件实现基于可靠度导引的相位解包算法，得出最后的原始相位图，并对得出的波面进行分析。81682
毕业论文关键词 移相干涉技术 相位展开 最小二乘 可靠度导引
毕业设计说明书外文摘要
Title Research on several phase unwrapping algorithms
Abstract Three-dimensional profile measurement is achieved by phase shifting interferometry (PSI) with high precise and sensitivity。 The non-contact metrology method is applied in PSI。 It is used to test many physical objects widely and one of the methods to high-precision optical experiments。
According to the fundamental principle of PSI, the phase is wrapped in the range from to because of the function of 。And the wrapped phase is formed。 In order to obtain the original phase, the wrapped phase must be unwrapped。 Unwrapping algorithms are pided into two categories。 One is the path tracking algorithm。 The other is the path-independent algorithm。 Fast two-dimensional phase-unwrapping algorithm which belongs to path tracking algorithm is based on sorting by reliability following a non-continuous path。 And the weighted least squares algorithm and the non-weighted least squares algorithm belong to path-independent algorithms。 The two algorithms are introduced to know their theories and methods。
Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a non-continuous path is realized by MATLAB。 The original phase map is gained。 And the wave front is analyzed。
Keywords phase shifting interferometry phase unwrapping least squares reliability guide
目 次
1 绪论 1
1。1 课题的研究背景和意义 1
1。3 主要研究工作 4
2 相位解包的实现 5
2。1 相位解包的原理 5
2。2 相位解包的基本方法 7
2。3 基于可靠度导引的相位解包算法 8
2。4 最小二乘解包算法 15
2。5 本章小结 19
3 基于可靠度导引的相位解包算法的实现 20
3。1 MATLAB实现算法的流程 20
3。2 MATLAB仿真结果分析 24
3。3 MATLAB实验结果分析 26
3。4 本章小结 30
结 论 31
致 谢 几种相位解包算法的研究:http://www.youerw.com/jisuanji/lunwen_95559.html