摘要：压电驱动器具有体积小、分辨率高和响应快等特点，一直是驱动器领域的研究热点。本文基于锆钛酸铅（PZT）的逆压电效应，利用微细加工技术，设计并制备出PZT压电驱动器，将电能转换为机械能，实现对液体的微流体控制。42865

通过性能仿真，优化设计了PZT压电驱动器结构。通过共晶键合工艺，实现了PZT与硅（Si）的键合。然后，利用物理减薄工艺，实现了PZT从近百微米到10微米左右的减薄。接着，采用波长为248 nm KrF准分子激光器的激光束加工，对减薄后的PZT薄膜进行图形化加工。为了获得高质量的PZT微驱动器，通过优化 KrF准分子激光的加工参数（如激光强度、脉冲频率、扫描速度以及扫描次数等参数）与PZT加工深度的关系，找出PZT加工的最优加工参数。此加工工艺的研究对其它相关器件制备也具有重要参考意义。

最后，通过对压电驱动器进行性能测试，验证了压电驱动器的结构设计和制备工艺的可行性。

毕业论文关键词：压电驱动器；微细加工；逆压电效应；共晶键合；准分子激光

The Piezoelectric Actuator Based on Micro Fabrication Technology

Abstract: Piezoelectric actuator has the characteristics of small size, high resolution and fast response. It has been a research focus in the drive field. In this paper, based on the inverse piezoelectric effect of lead titanate (PZT), the PZT piezoelectric actuator is designed and fabricated by using the micro fabrication technique. The electric energy is converted to mechanical energy, and the micro fluid control of the liquid is realized.

Through performance simulation, the structure of PZT piezoelectric actuator is designed and optimized. The bonding between PZT and silicon (Si) was achieved by the eutectic bonding process. Then, by using the physical thinning process, the PZT is reduced from about 100 microns to about 10 microns. Next, the PZT thin films were processed by laser beam with a wavelength of 248 KrF nm excimer laser. In order to obtain high quality PZT micro actuator, by optimizing the KrF excimer laser processing parameters (such as the relationship between laser intensity, pulse frequency, scanning speed and scanning times and other parameters) and PZT depth of processing, to find out the optimal processing parameters on the PZT processing. The research of this process has important reference value for other related devices.

Finally, the structure design and fabrication process of piezoelectric actuator are confirmed by testing the performance of the piezoelectric actuator.

 Keywords: Piezoelectric actuator; Micro fabrication; Inverse piezoelectric effect; Eutectic bonding; Micro machining; Excimer laser

 目录

摘要 i

Abstract .i

1 绪论 1

1.1 研究背景 1

1.2 国内外研究现状 2

1.3 研究目的与意义 3

2 PZT压电驱动器的原理 5

2.1 压电材料特性 5

2.2 PZT压电驱动器的工作原理 6

3 PZT压电驱动器的结构设计与性能仿真 8

3.1 PZT压电驱动器的结构设计 8

3.2 PZT压电驱动器的性能仿真 8

4 PZT压电驱动器的制备工艺 12

4.1 PZT-SI共晶键合工艺 12