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摘要单层压电陶瓷致动器作为一种拥有着高精度、高响应速度、好的线性度以及低功耗等优点的器件已经被广泛的应用在了通信、医学等诸多领域。但是，随着科学技术的发展，单层的压电致动器已经慢慢的无法满足当前诸多领域的应用需求。于是在低电压下能产生大位移、大推力的多层压电致动器受到了越来越多的关注。28719
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本文采用先进的低温共烧技术来制备PZT基多层压电致动器。本文中所制作的压电陶瓷使用的化学式可写为:0.90Pb(Zr0.48Ti0.52)O3-0.05Pb(Mn1/3Sb2/3)O3-0.05Pb(Zn1/3Nb2/3)O3 (PZT-PMS-PZN)。对制作的压电陶瓷致动器在低电压下的大位移性能进行了重点研究。
最终的结果表明：烧结致密的多层压电陶瓷致动器层之间界面清晰，并且缺陷极少，压电层和内电极层的厚度分别为40μm和6μm。制作的60层压电陶瓷致动器在80V的直流驱动电压下能产生2.7μm的纵向位移，应变量达到了0.1%。
关键词 PZT基压电陶瓷 多层压电陶瓷致动器 低温共烧陶瓷
毕业论文设计说明书外文摘要
Title The research and application of the piezoelectric pile
Abstract
Piezoelectric actuators have possess several excellent functional abilities, such as fast response, good linearity and low power consumption. Duo to their excellent functions, these materials are largely utilized in lots of areas, which include communication, electronic industry, and medical science etc, Meanwhile, with the advancement of science, the monolayer piezoelectric actuators are found difficult to meet the current requirements of large displacement and generating force at the low applied voltage, because of their disadvantage of high applied voltage and small displacement. In order to overcome these drawbacks, multilayer ceramic actuators have received great attention.
In this work, multilayer piezoelectric ceramic actuators were fabricated by advanced low temperature co-fired ceramic (LTCC) method .Their properties were examined and the applications were explored in novel devices .A multilayer ceramic actuator composed of 0.90Pb(Zr0.48Ti0.52)O3- 0.05Pb(Mn1/3Sb2/3)O3-0.05Pb(Zn1/3Nb2/3)O3 (PZT-PMS-PZN) layers and electrically conducting silver metal layers was fabricated and the property of large displacement in the low applied voltage was focused.
The results indicate that the sintered multilayer ceramics actuator shows distinct layers with few defects at the interface. The thicknesses of the piezoelectric and conducting layers are about 40 μm and 6 μm, respectively. The multilayer PZT-PMS-PZN actuator, composed of 60 active piezoelectric layers, presents a longitudinal displacement of about 2.7μm at an applied direct voltage of 80V, approximately 0.1% of the total thickness of itself.
Keywords Multilayer piezoelectric ceramic actuator PZT based piezoelectric ceramics Low temperature co-fired ceramic
目 录
1引言 1
1.1压电材料 1
1.2 致动器用锆钛酸铅（PZT）基压电陶瓷 3
1.3多层压电陶瓷致动器概述 5
2 LTCC材料的选择、制备与性能测试 7
2.1材料的选择 7
2.2 0.90PZT-0.05PMS-0.05PZN粉体和陶瓷的制备 13
2.3压电陶瓷性能的测试 10
2.4本章小结 14
3 低温共烧多层PZT-PMS-PZN压电陶瓷致动器 15
3.1引言 15
3.2样品的制备 15
3.3结果与讨论 19
3.4章小结 23
4 总结与展望 25
4.1本论文的工作总结 25
4.2下一步的研究展望 25
致 谢 27
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