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    energy dispersive x-ray spectroscopy (EDX). X-ray photo-
    electron spectroscopy (XPS) using a 5600 Multi-Technique
    System (PHI, USA) was applied to study the elemental
    distribution and oxidation status of elements in the coatings.
    The sample surfaces were analyzed, and then the interior
    after 6-min sputtering with a 4 kV Ar
    ? gun (5 9 5 raster
    and 23.5 A/min sputter rate on SiO2/Si reference samples).
    The crystalline structure was studied using XRD with CuKa
    radiation (wavelength k = 0.1541 nm) using a Scintag h:h
    powder diffractometer, equipped with a liquid nitrogen
    cooled Ge solid-state detector. The scanning range was
    between 2h = 20 and 70.
    The coating’s hardness was measured using a microh-
    ardness tester equipped with a Knoop indenter at a load of
    0.1 N. Every microhardness (HK) value was the average of
    five measurements. The coating adhesion was assessed by a
    scratch test (CSM-REVETEST) using a diamond indenter
    whose radius of curvature was 0.2 mm. Each scratch was
    5 mm long at constant load, after which the scratch track
    was examined by optical microscopy. The scratch load was
    increased until the first appearance of coatings failure
    (defined as substrate exposure), determining a critical load,
    Lc. The tribological behavior was studied using a tribom-
    eter (CSM) against a 300
    WC ball in ambient air. The linear
    sliding speed was 0.1 m/s. Two sets of tests were con-
    ducted: (1) with a load of 1 N and a sliding distance of
    300 m, and (2) a load of 5 N and a sliding distance of
    100 m. After the wear test, the cross section of the wear
    track was measured using a profilometer and was used to
    calculate the wear coefficient, W = V/Ls where V is theremoved volume, L is the load, and s is the sliding distance
    [32].
    Results
    Arc behavior and ion current measurements
    Influence of the arc current on cathode spot motion and ion
    current
    The saturated ion current, Ip, was measured as a function of
    Iarc using the straight duct configuration (Fig. 1b). For Zr
    arcs, increasing Iarc from 50 to 100 A increased Ip from 1.4
    to 2.5 A. However, with further increases of Iarc, Ip
    decreased sharply, to 0.3 A at Iarc = 175 A. Visual obser-
    vation of the cathode spot motion showed that initially
    increasing Iarc increased the number of cathode spots on the
    cathode front face. However, when Iarc C 100 A, the
    number of spots on the face decreased as they concentrated
    on the peripheral conical surface. At Iarc C 150 A, no spots
    were observed on the cathode front face. The same quali-
    tative behavior was found for the Al cathode. The highest
    Ip = 1.9 A, and the most intense spot activity on Al cathode
    front surface were observed at Iarc = 75 A.
    Influence of oxygen pressure on the arc behavior
    Figure 2 shows the influence of P on Ip collected from Zr
    and Al cathodes, in the straight duct configuration. The
    open symbols represent an oxygen environment (PO2
    ) and
    the solid symbols, a mixed Ar ? O2 environment (PAr=O2
    ).
    In vacuum, Al and Zr had an Ip of 1.9 and 2.5 A, respec-
    tively. Introduction of O2 sharply decreased (Ip)
    Al
    to 0.9 A
    at PO2
    = 0.2 Pa, and then it was maintained almost con-
    stant up to PO2
    = 0.5 Pa. Further increase in PO2
    rapidly
    decreased (Ip)
    Al
    to 0.1 A at PO2
    = 1 Pa. For Zr, a similar
    trend was found, although (Ip)
    Zr
    decreased constantly, with
    a lower decrease rate in the pressure range 0.2\PO2
    \
    0.5 Pa. The experiments in oxygen environment were
    characterized by unstable arc operation and a tendency for
    the arc to spontaneously extinguish.
    Addition of Ar to the environment increased Ip consid-
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