摘要本课题的研究对象是TaWN纳米复合薄膜，通过采用多靶磁控溅射法来制备不同W成分的薄膜。将不同W成分的薄膜材料进行性能分析，得出含W量为20。39%的TaWN纳米复合薄膜的综合性能好，并将此薄膜材料来进行室温蠕变性能的研究分析。83535

材料的蠕变性能是衡量材料寿命的重要参数，而蠕变变形速率的影响因素包括温度、材料的性质、加载的时间、加载的结构应力等。结合纳米原位测试仪得出的数据和计算公式可以得到纳米薄膜的硬度值、弹性模量值、蠕变应变速率值和应变速率敏感性。纳米压痕实验设定饱载时间为40S，选取5个不同的加载载荷来获得与薄膜的室温蠕变性能相关的一些数据，并进行分析。根据数据分析可以得到TaWN纳米复合薄膜的某些力学性能特点和尺寸效应：从硬度与弹性模量值可以看到，TaWN纳米复合薄膜材料既具有高强度、高韧度的特点；蠕变变形量随加载的载荷的增大而增大，并且前期的加载并没有使蠕变消除；加载载荷增大，蠕变深度呈现上升的趋势；随着加载载荷的不断增大，蠕变应变速率减小，这体现出了TaWN纳米复合薄膜的压痕尺度效应；应变速率敏感性随压入深度的增大而增大。

毕业论文关键词：TaWN纳米复合薄膜；蠕变；应变速率

Abstract In this paper, TaWN nanocomposite film is made by the method of multi-target magnetron sputtering with different W target power。 The TaWN composite film with different W component was found that TaWN nanocomposite film with 20。39% W has the best comprehensive performance。 

Creep property of materials is an important parameter to measure the life of material, and the impact factors of the creep strain rate include the nature of materials，the temperature, loading time, structural stress of loading and so on。 Combine the data by Nano-indentation probe and formulas can obtain hardness values, elastic modulus, creep strain rate and strain rate sensitivity value。 Then room temperature creep of the film was measured by nano-indentation。 The hold time is 40S, and 5 different loadings were selected to analyze the room temperature creep properties of the film。 Some mechanical properties and characteristics of size effect can be obtained from nano-indention experiment。 It can be seen that the hardness and elastic modulus of TaWN nanocomposite film material has the characteristics both high strength and high toughness。 The creep deformation amount increases with the applied loads, and the pre-load creep strain do not relief。 With the increase of loads, the depth of creep increase。 With the loads increasing, the creep strain rate decreases。 It reflects the scale effect of TaWN nanocomposite film。 Meanwhile, strain-dependent rate sensitivity increases with the increment of indentation depth。

Keywords: TaWN nanocomposite films;creep;strain rate

目  录

第一章 绪论 1

1。1  课题的背景 1

1。2  纳米材料的概述 1

1。2。1 纳米科学与技术的定义 2

1。3  薄膜的概述 3

1。3。1 薄膜材料的定义和分类 3

1。3。2 薄膜材料的性能 4

1。4  蠕变的概述 4

1。4。1 蠕变的定义和分类 5

1。4。2 蠕变性能研究方法 7

1。4。3 室温蠕变性能的影响因素 8

1。5  研究的意义