尘埃粒子计数传感器稳定性测试
毕业论文关键词： 光散射 计数传感器 稳定性 分辨率
毕业设计说明书外文摘要
Title The Stability Test of the Airborne Particle Counter Sensor
Abstract
With the development of science and technology, the industrial production’s requirement of the production environment cleanliness is getting higher and higher. The airborne particle counter is a kind of typical air clean test instrument, which is used to measure the number and size of suspended particles in the air, and provide the basis for evaluation of the purity of the air. Based on Mie scattering theory, this paper addresses the temperature stability of dust particle counter sensor experiment research. By changing the environment temperature of the laser light source parts and the circuit, I completed the experiment of 0.5μm、0.6μm , the two standard series of particles, inspecting two counter sensor’s characteristic parameters which were the particle concentration error and resolving power. The results show that: when the environment temperature changes, the laser light source parts changes little; while the circuit part is affected by temperature very significantly. With the increase of working environment temperature, the performance of the counter is getting worse, which is mainly caused by the diode of processing circuit.
Keywords： Light Scattering，Counter Sensor， Stability， Resolving Power
目 次
1 绪论1
1.1 研究背景1
1.2 国内外研究现状2
1.3 本文主要工作3
2 尘埃粒子计数器基础理论4
2.1 Mie散射理论 4
2.2 尘埃粒子计数器基本结构及评价参数6
2.3 二极管工作原理及温漂理论分析 10
2.4 本章小结 13
3 计数传感器温度稳定性测试 14
3.1 粒子浓度示值误差 14
3.2 计数传感器分辨率的温度稳定性测试 18
3.3 本章小结 21
4 去除二极管的计数传感器温度稳定性测试 22
4.1 粒子浓度示值误差 22
4.2 计数传感器分辨率的温度稳定性测试 23
4.3 本章小结 25
结论26
致谢27
参考文献28
1 绪论
1.1 研究背景
近年来，随着工业化生产环境对洁净度的要求不断提高，尘埃粒子计数器技术得到了快速蓬勃的发展。从军工领域迈进民用，从高端技术渗透进社会各个层面，以尘埃粒子计数器为代表的洁净技术正在逐步提高人类社会的生产能力、改善人类的居住环境。在半导体制造业中，当前社会对电子元件尺寸要求愈加苛刻，生产加工环境的洁净度将直接影响产品的合格率，据统计约超过80%因为电学特性失效的电子芯片是由于生产环境中尘埃粒子的污染而造成的[1]。以半导体材料硅片为例，空气的尘埃粒子能引起芯片电路元件开路或者短路。而在医疗卫生领域，药品生产过程需要尽可能避免尘埃粒子、微生物等颗粒的污染[2][3]。
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