雕塑薄膜及其制备方法研究+文献综述
关键词 雕塑薄膜，倾斜沉积，各向异性.毕业设计说明书（论文）外文摘要7966
Title Study on Sculptured Thin Films and Preparation Methods
Abstract
Glancing angle deposition is a new technology for thin film preparation．The sculptured thin film(STF)with a variety of shape can be prepared by substrate rotating and sloping into glancing angle during process．In addition，birefringence occurs in the sculptured thin films．Sculptured thin films have the characteristics of optical anisotropy, so they can have optical properties that the traditional thin films can’t possess．This opens up a new way to design and prepare the optical films．In this paper, potential application of sculptured thin film was described, the process of growth and the development history of thin film technology was expounded, and the growth theory and preparation methods of the STF was summarized. The different kinds of preparation parameters, such as substrate temperature, the rate of evaporation, ion source energy, oxygen quantity and the glancing angle influenced on the thickness and refractive index of the STF was analyzed. The results can provide the basis for preparing the sculptured thin films with good uniformity.
Keywords sculptured thin film, glancing angle deposition, anisotropy
目录
1 引言 1
1.1 选题的科学意义和应用前景 1
1.2 国内外发展现状 2
1.3 本课题的主要研究内容 3
2 薄膜技术与镀制工艺 4
2.1 薄膜的生长过程 4
2.2 薄膜技术的发展 6
3 雕塑薄膜 8
3.1 雕塑薄膜的生长理论 8
3.2 雕塑薄膜的制备方法 9
3.3 工艺参数对雕塑薄膜生长的影响 13
4 实验结果及分析 15
4.1 实验仪器介绍 15
4.2 不同工艺下的雕塑薄膜参数分析 19
4.3 实验中遇到的问题及解决过程 23
结 论 24
致 谢 25
参 考 文 献 26
1 引言
由于工业市场对于特殊材料和涂层的需求不断发展，半个多世纪以来，对于薄膜制备方法的研究取得了极大的提高。对传统薄膜的制备方法加以改进，调整和控制薄膜的微观结构可以得到新型的薄膜材料。雕塑薄膜就是在这种背景下产生的。
使用电子束蒸发技术沉积薄膜时，若气流入射方向与基片表面垂直，得到的是各向同性的薄膜材料。然而，如果将基片倾斜一定的角度，控制气流入射方向与基片表面法线方向的夹角，再令基片以不同的方式旋转，可以得到不同于传统结构的各向异性薄膜，从而使薄膜的性能发生根本性的变化。这种通过控制制备技术、改变薄膜的微结构而制备的薄膜就是雕塑薄膜(sculptured thin film，简称STF)[1]。
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