摘要本文以引信用固态锂电池MEMS接电开关为研究对象，设计了一种能识别正常发射环境下与勤务跌落环境接电开关。本文采用了一种单自由度微弹簧质量系统，通过有限元软件ANSYS仿真，仿真结果初步证明了系统数学模型的可行性。然后对结构中的“S”型微弹簧进行仿真，并分析了各参数对“S”型微弹簧刚度的影响，为后续设计提供了基础。在微弹簧基础上，本文设计了开关区分机构。通过对开关区分机构的仿真分析，本文对区分结构进行了优化。在区分机构基础上，本文设计了开关的闭锁机构，以满足开关的接电要求。最后，对加工工艺做了简单介绍。61135
毕业论文关键字：微机电系统，惯性开关，S形微弹簧，弹性系数，闭锁机构
毕业设计说明书（论文）外文摘要
Title Structure Design of a MEMS Inertial Switch
Abstract This paper designs a MEMS electrical switch for MEMS fuze solid-state lithium batteries to distinguish the normal emission environment and the accidental fall environment. Based a single degree of freedom micro-spring-mass system, this paper proves the feasibility of the system model through the finite element software ANSYS simulation results initially. Then, using ansys to simulate the effects of various parameters impacting on the S-shaped micro spring stiffness is analyzed, and provides a basis for the following design. Based on the micro-spring, the paper designs the switching distinguished structure. Through switching distinguished structure simulation analysis, the distinguished structure is optimized. Based on the distinguished structure, this paper designs a kind of latching mechanism, which is to meet the requirements of electrical switch. Finally, a brief introduction of the process is mentioned.
Keywords: MEMS, inertial switch, S shaped micro spring, coefficient of elasticity, the latching mechanism
1 绪论 1
1.1 课题背景与意义 1
1.2 MEMS技术介绍 1
2 理论分析 4
2.1 系统理论模型 4
2.2 自由振动系统推导 4
2.3 强迫振动系统推导 6
2.4 微弹簧 7
2.5 质量块 9
3 区分机构结构设计 9
3.1 结构参数 10
3.2 模态仿真 10
3.3 瞬态仿真 11
4 区分机构分析 14
4.1 位移区分分析 14
4.2 速度区分分析 16
4.3 能量区分分析 19
4.4 质量块优化 21
4.5 微弹簧优化 23
5 闭锁机构 26
6 LIGA与UV-LIGA技术介绍 29
结 论 32
致 谢 34
参考文献 35
1 绪论
1.1 课题背景与意义 ANSYS一种惯性驱动MEMS开关结构设计:http://www.youerw.com/jixie/lunwen_66757.html