CCD研磨亚表面裂纹表征方法研究

摘要在时代不断发展，科技不断进步的大环境下，光学元件的光学表面特性对各个领域的影响越来越大，光学系统的抗激光损伤阈值和大型光学系统的成像及镀膜质量、系统的长期稳定性，很大程度上影响着各高新科技的发展。为此，光学元件的亚表面层的裂纹损伤状况也受到广泛的关注。77162

本文研究了基于全内反射法原理测量光学元件亚表面损伤深度位置信息的一种测量方法，并对亚表面裂纹状况作出评价，从而得出亚表面裂纹的表征方法。首先，分析了入射光与反射光在光学表面叠加形成的驻波，会受到偏振态和入射光的入射角度的影响，发生明暗变化，根据该明暗变化，来获得亚表面损伤点的深度位置；其次，对实验系统进行设计，设计出将激光光源通过偏振态的转换，和入射角的改变的情况下，通过半球样品入射到样片表面，通过CCD捕获图像，获得了一系列的光斑图像；最后，根据实验图像我们知道亚表面裂纹是由图像中的光斑点构成的，并且验证了该方法能够实现对亚表面裂进行表征，表征结果：s偏振态比p偏振态更适合实验；入射角变化可以估计损伤点的深度位置；在压力一定的情况下，抛光时间的增加使得亚表面损伤减少，最后维持在一个非常低的数量水平。

毕业论文关键词亚表面裂纹全内反射法表征方法驻波偏振态入射角度抛光时间

毕业设计说明书外文摘要

Title The Study of the Characterization Method of Polished Subsurface Cracks

Abstract With the development of the scientific modern society, the surface of optical element plays a significant role in various fields。The anti-laser damage threshold of optical system, the image quality large optical system, and directly reduces its service life, long-term stability, coating quality and long-term stability of the system will seriously affect the growth of high-tech。Therefore,the status of the subsurface of optical element has been widely recognized。

In this paper, a method of measuring the subsurface damage depth position was studied, which is based on the principle of total internal reflection。First of all,According to basic principle of the total internal reflection method,we analyzes the relationship between the visibility of subsurface damage points at different depths position and the angle of incidence by the standing wave formed in the internal sample, and by changing the angle of incidence to estimate the depth of subsurface damage。Moreover,we design the optical system to fulfil the requirement of the experiments。 At last,we analyse the status of the subsurface damage depth position in the experiment and find that the S-polarization is more suitable to the experiment,thesubsurface damage depth position can be found by changing the angle of incidence by the standing wave and with a longer polishing time ,the subsurface damage will be less in the controlled pressure。

Keywords subsurface damage total internal reflection standing wave polishing time

1 绪论 1

1。1 课题的研究意义及其背景 1

1。2 研究现状 2

1。3 检测方法的介绍 2

1。4 本文研究内容 8

2全内反射法检测方法综述及其光学系统设计 9

2。1 全内反射法的基本原理 9

2。2 全内反射法测量亚表面损伤系统的设计 18

3 基于全内反射法检测亚表面损伤深度具体实验 22

3。1不同偏振态对损伤光斑可见度的影响 23

3。2入射角变化的条件下损伤光斑可见度的变化 24 CCD研磨亚表面裂纹表征方法研究:http://www.youerw.com/tongxin/lunwen_88652.html