铜催化制备SWNTs平行阵列工艺研究
摘要单壁碳纳米管（SWNTs）相对于传统半导体材料，有着更突出的载流子迁移率。同时与单壁管的网状结构相比，SWNTs平行阵列有着极小的接触电阻，因此，SWNTs平行阵列在多种高频电子器件中有着很大的应用价值。68180
传统催化剂比如铁、钴，镍等，在硅片上利用快速加热法制备SWNTs平行阵列的技术已经较为成熟。因为铜没有铁磁性，因此制备出来的SWNTs即使有催化剂残留，也不影响对其磁性性能的研究，所以利用铜制备出SWNTs平行阵列是许多人的目标。然而纳米铜有着特殊的性质，尤其是在高温下有着极强的挥发性，这就要求探索出一个与纳米铜催化剂相适应的快速加热工艺。为此，参照液相还原法在硅片上制备出了分散的纳米铜催化剂，然后进行了一系列工艺对比实验，借助场发射扫描电子显微镜和激光拉曼光谱仪的帮助，最终找出了与纳米铜相适应的快速加热法制备SWNTs平行阵列的工艺。同时，为了减弱咖啡环效应的不利影响，还发明的简单易用的胶带法，取得了很好的可重复效果。
毕业论文关键字：单壁碳纳米管 平行阵列 快速加热法 纳米铜 液相还原法
毕业设计说明书（论文）外文摘要
Title Copper catalyzing growth of horizontally aligned single-walled carbon nanotubes
Abstract
Compared to conventional semiconductor materials,single-walled carbon
nanotubes(SWNTs)have more protruding mobility of carriers. Meanwhile, Horizontally aligned SWNTs arrays have small contact resistance,compared with SWNTs network structure,therefore,they have great application value on a variety of high frequency electronic deviecs.
The technology of preparing horizontally aligned SWNTs arrays on silicon substrates using fast-heating method with conventional catalysts such as iron、cobalt、nickle etc,is relatively mature.Copper does not has ferromagnetic which does not influence the research on performance of magnetic property of SWNTs even with catalysts residuals,so,many people want to prepare SWNTs parallel arrays using nanocopper as catalysts. However,nanocopper has special properties,especially has strong volatility at high temperatures,which requires a new fast-heating technology adapted to nanocopper.For the target,I prepared dispersive nanocopper catalysts on silicon wafers,referring to liquid phase reduction method.The I did a series of comparative experiments ,with the help of field emission scanning electron microscopy and Raman spectroscopy.Enventually,I found out how to prepare horizontally SWNTs arrays on silicon walfers using fast-heating method with nanocopper as catalysts.In addition,I also invented simple adhesive tape method to weaken adverse effects of coffee ring effect and achieved good reproducible results.
Keywords:SWNTs, horizontally aligned arrays,fast-heating method,nanocopper,liquid phase reduction method
目录
目录 1
1引言 1
1.1研究目的和意义 1
1.2 单壁碳纳米管简介 1
1.3.1 快速加热法制备SWNTs平行阵列研究进展 3
1.3.2 铜催化制备SWNTs研究进展 5
1.4 研究内容 8
2 实验装置和制备方法 9
2.1 实验原料和实验设备 9
2.2 硅基片清洗工艺 10
2.3 在硅片上直接制备纳米Cu催化剂