摘要通过改变不同的中性电解液，不同的工艺条件研究氧化铝致密膜（以下简称致密膜）的制备工艺和性能特点，并研究导电高分子聚3，4-乙撑二氧噻吩（PEDOT）在氧化膜表面的气相聚合工艺。通过恒流限压阳极氧化法成功制备出了致密膜，通过掺杂和反向掺杂提高了致密膜的电化学性能，通过气相聚合法又在致密膜表面制得了PEDOT薄膜。78035

结果表明，所制得的致密膜在160V电压下漏电流最低可达5μA/cm2，50Hz频率下介电常数最高可达10。17。聚合PEDOT薄膜后介电常数同样有一定程度的增加。表明选用特定的阳极氧化电解液，并辅助相应恰当的生产工艺可以极大的提高致密膜的电化学性能，同时也证明了通过气相聚合法在致密膜表面聚合PEDOT薄膜是可行的。

毕业论文关键词致密膜；PEDOT；气相聚合法；漏电流；介电常数

Title The preparation of the aluminium-alumina- conductive polymer capacitor

Abstract In this paper,we study features and preparation process of the compact alumina films by changing different kinds of neutral electrolytes。At the same time, a chemical vapor-phase polymerization method was employed to prepare poly-3,4-ethylenedioxythiophene (PEDOT) as conducting films on the surface of the compact alumina films。In this study,we successfully prepared the compact alumina films through anodic oxidation of constant current and limit voltage。 The electrochemical performances of the compact alumina films are improved by introducting doping and anti-doping。the PEDOT conducting films are prepared by the vapor-phase polymerization method on the surface of the compact alumina films。

Result shows that the lowest leakage current of the compact alumina films is 5 μ A/cm2 at the voltage of 160V,and the highest dielectric constant is 10。17 under the frequency of 50Hz。The dielectric constant is also increaced after the polymerization of the PEDOT films。We find that the electrochemical performances of the compact alumina films are vastly improved by choosing the specific anodic oxidation electrolytes。The appropriate preparation process can help to improve the electrochemical performances,too。We also find that it’s a feasible way to prepare PEDOT conducting films by using a vapor-phase polymerization method。

Keywards  compact alumina films；PEDOT；vapor-phase polymerization method；leakage current；dielectric constant

1 引言 1

1。1 选题背景与意义 1

1。2 氧化铝致密膜概述 1

1。2。1 致密膜的电化学性能表征 1

1。3 PEDOT概述 2

1。3。1 PEDOT简介 2

1。3。2 PEDOT应用进展 4

1。3。3 PEDOT的聚合工艺 5

1。4 研究的内容和目的 7

2 致密膜的制备 8

2。1 实验药品及仪器 8

2。1。1 实验药品