摘要：用干涉法测量平板型光学元件时，平行光学平晶的前后表面间的多次反射的光波会进行干涉，在背景上形成寄生条纹，影响测量结果。为了消除这种寄生条纹，本文用详细的理论分析和公式推导得出通过同时倾斜平板和反射镜一定角度，当两角度值满足一定的关系式时，可以消除前后表面多次反射造成的影响，数理分析和实验证明了此方法可以有效的消除干涉测量小楔角平板中产生的杂散条纹而不受面形和材料均匀性误差的影响。通过倾斜平晶和反射镜的方法简单快捷，不需要对测量结果进行复杂的算法处理。63707

毕业论文关键字：干涉测量 平行平板 多次反射 寄生条纹

毕业设计说明书（论文）外文摘要

Title   Research on the method of eliminating spurious fringe    in the interference test for parallel optical window 

Abstract

When measured by interferometry, the light waves reflected multiply by the front and back surfaces of the parallel optical window will interfere with each other and produce spurious fringe in the backgrounds, which may affect the measurement result. To eliminate this parasitic stripe, the thesis presents detailed theoretical analysis and formula derivation. The solution is that when the value of the two angles satisfy a certain relationship, tilting both the window and the return flat properly can eliminate the impact of multiple reflections between the front and rear surfaces. Mathematical analysis and experiments proved that the method can effectively eliminate the spurious fringe resulted from measuring a window with a small wedge angle, not being affected by the surface parameter and material uniformity. This method is not only simple and fast, but also does not require complex algorithms to process measurement results or use antireflective coatings.

Keywords interferometry, parallel window, multiple reflection, spurious fringe

1  绪论 1

1.1  研究背景 1

1.2  光学元件检测方法概述 1

1.2.1  面形测量 1

1.2.2  均匀性测量 3

1.3  消除杂散条纹的方法概述 9

1.4  本论文主要内容及工作 11

2  消除寄生条纹原理研究 12

2.1  寄生条纹产生原因分析 12

2.2  三光束复振幅推导 13

2.2.1  RF垂直时复振幅推导 13

2.2.2  RF倾斜时复振幅推导 15

2.3  寄生条纹消除原理 18

2.3.1  干涉光叠加 18

2.3.2  寄生条纹消除原理 19

2.4  本章小结 20

3  消除寄生条纹的实验研究 22

3.1  消除寄生条纹的实验原理 22

3.2  实验器材的搭建与调整 23

3.2.1  实验装置的搭建 24

3.2.2  实验装置的调整 24

3.3  实验步骤与结果 25

3.3.1  实验步骤 25

3.3.2  实验结果