基于FDTD的掩模基底缺陷偏振态研究
关键词：FDTD Solutions软件 偏振 时域有限差分法
毕业论文设计说明书外文摘要
Title The study of the polarization of the defect of the mask substrate based on FDTD method
Abstract
Application of FDTD Solutions is the software for simulation analysis of polarization measurement of the optical mask substrate defects,which sets the Gaussian light source, producing a haze in 193nm conditions, to simulate different defects by the state model of FDTD Solutions software, and then software sets the grid resolution and other conditions to study vector components s and p of the far-field electric field, which analyzes polarization distribution,to study different sizes and shapes of the defects of the mask substrate form.FDTD method is based on Finite-Difference Time-Domain,discreting the electromagnetic space and time field, meshing the Maxwell equations, providing a lot of convenience to the polarization state of the study.According to the theoretical analysis, simulating different types of defects：three different shapes and the same size and two different sizes and same shape,fitting the amplitude and phase results of data, the impact of different shapes and different sizes of defects on the polarization state is calculated. The interpretation of the far-field electric field distribution in three dimensions , providing more accurate data analysis for the polarization state.
Keywords FDTD Solutions Software , polarization , Finite-Difference Time-Domain method
目 次
1 绪论 1
1.1 掩膜基底缺陷偏振态研究意义 1
1.2 光偏振态测量原理 1
1.2.1 锥形衍射 1
1.2.2 斯托克斯-穆勒公式 2
1.3 FDTD method应用背景 3
1.4 国内外研究现状 3
1.5 本论文研究方向和任务 4
2 FDTD method基本理论 6
2.1 FDTD method简介 6
2.1.1 有限差分的概念 6
2.1.2 FDTD method原理简介 7
2.1.3 FDTD method应用优点 13
2.2 FDTD仿真的精度分析 15
2.2.1 FDTD方法的数值稳定性分析 15
2.2.2 FDTD方法仿真的吸收边界 17
3 FDTD solution软件简介 18
3.1 软件简介 18
3.2 软件使用 19
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