毫秒激光对位置敏感探测器的损伤效应研究
本文首先建立了PIN型位置敏感探测器的模型，通过Comsol Multiphysics软件模拟毫秒激光辐照下PIN型位置敏感探测器的温度变化曲线，分析PIN型位置敏感探测器的表面温度分布。接着在温度场的基础上模拟掺杂离子的重分布。最后在温度场和浓度场的基础上模拟半导体物理场即电场分布和暗电流情况。28699
关键词 毫秒激光 数值模拟 温度场 位置敏感探测器
毕业论文设计说明书外文摘要
Title Damage effect of the position sensitive detector by millisecond laser
Abstract
Position Sensitive Device has widely applied in the domain of laser beam monitoring (alignment,displacement and vibration)、flatness detection and two-dimensional position detection system.The millisecond laser easy to bring some damage to the PIN type of Position Sensitive Device when the laser irradiation to it..Therefore,it is necessary to study the damage mechanism of interaction between millisecond laser and the PIN type of Position Sensitive Device.The article probes the damage mechanism of millisecond laser radiation the PIN type of Positon Sensitive Device from the angle of numerical simulation.
First,this paper estsblished a model of the PIN type of PSD,simulate the temperature change curve of PIN type of PSD which under the irradiation of millisecond laser through the COMSOL Multiphysics software,and analysis the surface temperature distribution of it..Then,this paper simulate the redistribution of doping ions on the basis of the temperature fields.Finally,this paper simulate the field of semiconductor physics,which include the electric field distribution and the situation of dark current based on the temperature field and the concentration field.
Keywords Millisecond Laser Numerical Simulation Temperature Field Position Sensitive Device
目 次
1 引言 1
1.1 研究的目的和意义 1
1.2 激光与光电位敏探测器相互作用的研究现状 1
1.2.1 研究概况 1
1.2.2 国外研究状况 1
1.2.3 国内研究状况 2
1.3 本文研究的主要工作 3
2 毫秒激光辐照PIN型光电位敏传感器所产生温度场的数值模拟 4
2.1 固体传热 4
2.1.1 固体传热的基本原理 4
2.1.2 热传导方程 4
2.2 PIN型PSD温度场的模拟 6
2.2.1 模拟方法的介绍 6
2.2.2 COMSOL Multiphysics仿真软件 6
2.2.3 PIN型PSD温度场计算模型 6
2.2.4 相关吸收系数和材料参数 8
2.3 温度场的模拟结果 9
2.3.1 光斑中心温度变化 9
2.3.2 温度场表面的横向分布 10
2.3.3 温度场表面的纵向分布 10
2.4 本章小结 11
3 P层掺杂离子重分布的数值模拟 12
3.1 稀物质传递物理场 12