STC89C54单片机PSD的光点移动量测量系统的研究
关键词 移相干涉 抗振 PSD 单片机 STC89C54
毕业设计说明书（论文）外文摘要6431
Title The development of measurement system of lightspots jitter based on PSD
Abstract
Phase-shifting interferometry (PSI), as a high-precision,high-sensitivity,high-spatial resolution non-contact optical measurement method, has been widely used in physical measurement with the optical path difference parameters.But also because of the high- precision and high-sensitivity reasons,it is vulnerable to the impact of environmental vibration,ambient vibration is a major source of phase-shifting interferometer measurement error.This paper focuses on the phase-shifting interferometer vibration technology progress and problems.And in-depth understanding of the interference principle and the interference pattern on the basis of the choice of the optical position sensor(PSD) as a photodetector,to detect the interference fringes jitter. By the PSD, the current - voltage conversion circuit, operational amplifier circuits and single chip. The system output different current based on interference fringes in the PSD photosensitive surface of the position change. The fringe shift amount and direction of the single-chip processing, in order to provide useful data to the subsequent vibration compensation.Here,I select 51S microcontroller development board,with the SCM chip,is STC89C54.After testing,the system for vibration below 100Hz.
Keywords: phase-shifting interferometer, active anti-vibration, PSD, SCM,STC89C54.
目 录
1 绪论 1
1.1 课题研究背景 1
1.2 本论文的主要工作 3
2 干涉仪的抗振技术的发展状况 4
2.1 软件技术：移相算法抗振 4
2.2 硬件技术：几种典型的抗振型移相干涉技术 4
2.2.1 快速采集干涉图法 4
2.2.2 同步移相干涉测量技术 4
2.2.3 共光路散射板移相干涉法 5
2.2.4 机电反馈式 5
2.2.5 声光、电光调制反馈式 6
2.2.6 半导体激光器反馈式 8
3 光点移动量（干涉条纹抖动量）的测量原理与方法 9
3.1 移相干涉测量基本原理 9
3.2 振动对移相干涉的影响 10
3.3 光点移动量（干涉条纹移动量）的检测 11