摘要硅微机械振梁加速度计是一种采用MEMS工艺制造，以振动梁的谐振频率来敏感外界加速度的惯性仪表。它具有体积小，重量轻，测量精度高的优点，具有广泛的应用前景。谐振梁加速度计输出振荡信号的频率与加速度信息直接相关，振荡信号幅值也是衡量加速度计工作状态的重要指标。本论文就是构建一个电路系统，实现对振荡信号的频率与幅值实时、高精度的测量。该系统的实现基于MATLAB软件与Simulink模块，通过编写实时数字信号处理算法来实现系统的主要功能。30046
论文中采用的是CORDIC算法测出频率与幅值，首先利用MATLAB编写相应程序来验证理论的正确性，验证成功后利用Simulink模块实现对整个电路系统的描述，对进行相关的仿真测试实现对振梁加速度计输出的振荡信号的数字化处理，从而得到其频率及幅值的实时读出。
在设计的实验中，本文所构建的电路系统达到预期目标，可以实现对硅微振梁加速度计频率与幅值的实时读出。
关键词 频率测量 幅值测量 MATLAB Simulink
硅微振梁加速度计频率与幅值实时读出系统设计
毕业论文设计说明书外文摘要
Title The Real-time Frequency and Amplitude Readout System Design Of Micromechanical Silicon Vibrating Beam Accelerometer
Abstract
Micromechanical silicon vibrating beam accelerometer is a kind of the MEMS manufacture,the resonance frequency of the vibrating beam is sensitive to the externally acceleration of inertial instrument. It has the advantages of small volume, light weight, high accuracy, and has wide application prospect. The output oscillating signal frequency of the Vibrating beam accelerometer is related to the value of acceleration, the amplitude of oscillating signal is a important part to measure the working status of accelerometer. This paper is to construct a circuit system,to realize the real-time measurement of frequency and amplitude of the oscillation signal and attain high precision. Implementation of the system based on MATLAB software and Simulink modules, by means of writing program of real-time digital signal processing algorithms to achieve the system's main function.
In this paper,we adopt CORDIC algorithm to measure frequency and amplitude,in this design,firstly,we verify the theoretical correctness by means of writing program of MATLAB,after successful verification using Simulink module realize the description of the whole circuit system,we design some relevant simulation tests to realize the digital processing of output oscillation signal of the vibrating beam acceleration,then we can get the real-time frequency and amplitude of the accelerometer readout.
In the experimental design,the circuit system reached the expected target, so this kind of real-time frequency and amplitude measurement method can be applied to the micromechanical silicon resonant accelerometer.
Keywords Frequency Measurement Amplitude Measurement MATLAB Simulink
目 次
1 引言 1
1.1微机电系统概述 1
1.2 硅微振梁式加速度计概述 2
1.3 硅微振梁式加速度计数据采集国内外现状 2
1.4论文主要工作 2
2 硅微振梁式加速度计数据采集方案 4
2.1频率测量基本方法 4
2.1.1 直接测频法 4
2.1.2 多周期同步法 5
2.1.3 基于CORDIC算法的测频及测幅方法6
2.2 频率测量方案比较8
2.2.1 方案一：直接测频法8
2.2.2 方案二：多周期同步法8
2.2.3 方案三：基于CORDIC算法的测频法8
2.3 幅值测量方法介绍及总结9
2.3.1 全波整流法9
2.3.2 同步调制法9 MATLAB硅微振梁加速度计频率与幅值实时读出系统设计:http://www.youerw.com/zidonghua/lunwen_25556.html