摘要本文在调研法国LAAS-CNRS实验室所研制的MEMS安全起爆器的基础上，对应用于灵巧起爆器起爆逻辑控制的常开微开关进行探索性研究。主要内容包括：

①介绍了常开微开关的作用原理，对常开微开关的结构尺寸及其材料选择进行设计；63767

②介绍了制备常开微开关过程中涉及到的相关MEMS工艺包括：图形反转光刻工艺、磁控溅射镀膜工艺、图形PCM检测工艺、热氧化工艺；

③设计并制备了常开微开关，并对制备过程中出现的现象进行分析，提出制备工艺优化的一些建议；

④对所制备的常开微开关电阻层进行电阻测量和不同电压下的熔断时间测试，并测试了所制备的常开微开关的作用效果，结果表明，其适合的作用电压为16V左右。

毕业论文关键词  常开微开关  MEMS  安全起爆器  火工品

毕业设计说明书（论文）外文摘要

Title    The design and fabrication method of the electric heating micro OFF-switch for smart safe initiator                     

Abstract

In this paper， it was based on the study of MEMS safe initiator which LASS-CNRS laboratory developed to make a exploratory research of micro OFF-switch applied in smart logic control detonator initiation. The main contents include:

①The action principle of the micro OFF-switch was explained and the structural dimensions and material of the micro OFF-switch were designed.

②The MEMS technology craft involved in the fabrication of the OFF-switch was introduced. They includes: Graphic reversal lithography， magnetron sputtering technology， graphics PCM testing process， thermal oxidation process.

③The micro OFF-switch was fabricated. And the phenomenon during the fabrication was analysed. Then some advice of process optimization was proposed.

④The resistance of the fabricated micro OFF-switch resistive layer was measured and the fusing time was tested when it was under different voltage. Then the effects were tested when the micro OFF-switch worked. The applied voltage of the fabricated micro OFF-switch was about 16V.

Keywords  micro OFF-switch   MEMS  safety initiator  Pyrotechnics

1  绪论 1

1.1  研究背景 1

1.2  MEMS火工品国内外研究现状 1

1.2.1  国外研究现状 2

1.2.2  国内研究现状 2

1.3  LAAS-CNRS实验室的MEMS安全起爆器介绍 4

1.3.2  该MEMS安全起爆器的功能 4

1.3.3  该MEMS安全起爆器中的MEMS芯片 5

1.4  本文的主要研究内容 6

1.5  小结 6

2  电热常开微开关的设计 6

2.1  电热常开微开关的作用原理 6

2.2  电热常开微开关的优点 7

2.3  电热常开微开关的制备原理 7

2.3.1  电热常开微开关的结构 7

2.3.2  常开微开关的各部分结构设计及其材料选择 8

2.3.3  常开微开关的尺寸设计 10

2.4  小结 11

3  相关MEMS工艺介绍