摘要随着MEMS技术的不断发展，MEMS的应用已扩展到军事领域。利用MEMS技术可以减小火工品尺寸和质量，降低成本和能耗，提高安全性、可靠性等，使得火工品性能大大提高。研究MEMS发火装置对引信的小型化及弹药的智能化和灵巧化有重要意义。63832

本文在查阅相关文献的基础上，对MEMS引信微安保系统进行初步的探索性研究，该装置包含两个常闭开关和一个常开开关，本文对其中的常闭微开关进行设计和制作。整个常闭开关的尺寸为10mm×10mm。结合现有的工艺条件，采用热氧化、光刻、磁控溅射镀膜等工艺进行常闭开关的制作。得到了一些样品。

最后，对样品进行通电实验，研究常闭开关的作用效果，分析了常闭开关加热电阻以及电线的电热特性。从测试结果也可以得出在45V电压作用下，常闭开关能实现断开功能。对今后进一步完善常闭开关的设计以及研究MEMS安全发火装置奠定了基础。

毕业论文关键词  MEMS  安全发火装置  常闭开关  制作工艺

毕业设计说明书（论文）外文摘要

Title   Design and development of micro electro-thermal ON-OFF switch of smart pyrotechnics                   

Abstract With the continuous development of MEMS,MEMS have seen their field of application extended to military. It is due to the fact that MEMS technique can reduce the size,mass,cost and power consumption,improve the security ,reliability and so on. The performance of pyrotechnics can be greatly improved. Research on MEMS based safe electro-thermal pyrotechnic igniter is of great important to fuze and ammunition, then achieving the goals of Miniaturization and ammunition intelligence and dexterity.

    After researching a large number of relevant literature, preliminary

exploratory study on MEMS based safe pyrotechnic igniter had been done .The safe pyrotechnic igniter has two ON-OFF switches and one OFF-ON switch.The design and development of ON-OFF switch is presented in this paper.

    The 10mm×10mm ON-OFF switch was tried to fabricate,with the process progresses of thermal oxidation,Magnetron sputtering,Lithography.Some samples were successfully fabricated.

    Energized test had been done to study the effect of the ON-OFF switch .the the electro-thermal characteristics of the resistant and electric line have been presented in this paper.The test results also show that the electrical line of ON-OFF switch can be broke with a constant voltage of 45V.In summary,this research is of great use to improve the design of the ON-OFF switch and contribute to the study of MEMS based safe electro-thermal pyrotechnic igniter.

Keywords  MEMS ,safe pyrotechnic igniter, on-off switch ，making process  

1  绪论 1

1.1  课题背景 1

1.1.1  研究背景和意义 1

1.1.2  MEMS技术介绍 1

1.1.3  引信安全系统发展状况 1

1.1.4  MEMS在引信中的的应用 2

1.2  MEMS微安保装置国内外研究状况 2

1.3  法国LAAS-CNRS实验室MEMS引信安全发火装置 3

1.4  论文主要内容 6

2  常闭开关的设计 6

2.1  常闭开关介绍 6

2.2  常闭开关结构设计 7

2.2.1  方电阻的概念