摘要本文通过真空磁控溅射的方法制备了CuO/Al2O3/Al、CuO/Al/Al2O3/Al（两个半周期）、CuO/Al/Al2O3/Al（八个周期）复合飞片。用共聚焦显微镜表征了三种飞片的膜厚，厚度分别为6.5µm、6.2µm、6.5µm。本实验采用SEM扫描电镜对三种不同类型的复合飞片进行表征，复合飞片的表面结构平整均匀，各层薄膜界面处结合紧密。采用光子多普勒技术（PDV）对飞片速度进行测量。实验结果说明，总体上飞片速度随激光能量的增加而增大。在同等激光能量下，膜厚越薄，飞片速度越大。用共聚焦显微镜观察复合飞片的撞击坑形貌，随着激光能量的增加，复合飞片的撞击坑形貌比较一致，没有明显的变化规律。63830

毕业论文关键词  磁控溅射  复合飞片  PDV技术  撞击坑形貌

毕业设计说明书（论文）外文摘要

Title     Regularity Study of Laser-driven composite flyer plates       

Abstract In this paper, CuO/Al2O3/Al, CuO/Al/Al2O3/Al (two and half-cycles), and CuO/Al/Al2O3/Al (eight cycles) composite flyer were prepared by vacuum magnetron sputtering. Confocal microscopy was used to characterize the thickness of each flyer. The thickness of CuO/Al2O3/Al, CuO/Al/Al2O3/Al (two and half-cycles), and CuO/Al/Al2O3/Al (eight cycles) composite flyer were respectively 6.5μm, 6.2μm, 6.5μm. Then, the films were observed by scanning electron microscopy (SEM). The results showed that the films’surface were smooth, and the interfaces between different layers were compact.. PDV technique was used to measure the speeds of the flyers. The test results showed that the flyer’s velocity increases with rising laser energy. With the same laser energy, the flyers containing CuO / Al ablation layers had a higher velocity than those containing CuO ablation layer. The flyer’s crater morphology were observed by confocal microscopy. When laser energy increased, flyer’s crater morphologies did not show any significant regularity .

Keywords  Magnetron sputtering， Composite flyer， PDV technology  Crater morphology

1  绪论 1

1.1  本论文研究的目的和意义 1

1.2  国内外研究进展 1

1.3  本论文主要研究内容 3

2  激光飞片换能元的制备与表征 4

2.1  实验装置与方法 4

2.1.1  磁控溅射装置 4

2.1.2  磁控溅射镀膜的工作原理 4

2.1.3  镀膜机的操作步骤 6

2.1.4  实验样品制备 6

2.1.5  飞片膜厚表征 7

2.1.6  薄膜的SEM表征 9

2.2  实验结果与分析 9

3  激光飞片换能元性能测试 11

3.1  激光飞片速度测试 11

3.1.1  原理 12

3.1.2  实验装置与方法 12

3.1.3  实验结果与分析 14

3.2  激光飞片撞击测试 19

3.2.1  装置与方法 19

3.2.2  结果与分析 20

结  论