摘要为了解决MEMS火工品点火输出能力不足的缺点，研究者们考虑将新的微纳含能复合材料引入MEMS体系，增强其点火可靠性，其中金属/金属氧化物纳米铝热剂薄膜以其较高的能量密度和释能速率成为研究热点。目前纳米铝热薄膜主要有多层膜和核壳纳米线两种结构，二者各有缺点，不能很好地满足实际应用需求。本文通过聚苯乙烯微胶球反模板法，制备出三维有序多孔金属氧化物骨架，然后通过磁控溅射将Al沉积到骨架上，形成多孔Fe2O3/Al纳米铝热薄膜。DSC热分析测得材料的总放热量为1244.66 J·g-1。该法方法既能保留纳米铝热剂薄膜的优点，又具有生产周期短、杂质含量少、组分间结合紧密、金属氧化物种类多样化等优点。64347

毕业论文关键词  聚苯乙烯模板，三维有序多孔，铝热剂，Fe2O3/Al，含能薄膜

毕业设计说明书（论文）外文摘要

Title  The  Method  Research  of  Three-Dimensionally  Ordered Macroporous  Nanothermite

Abstract The researchers considered the integration of micro and nano energetic materials onto the MEMS Pyrotechnics devices in order to improve its ignition output energy. 

Therefore, metal/metal-oxide nano-thermite films with high output energy and compatible with MEMS process had become a foucs. There has been a great quantity of research on nano-thermite films, such as multilayer foils and core-shell nanowires, but they are limited in practical application. In this study, we have introduced a new method to prepare nanoenergetic material. First, a facile procedure to prepare three-dimensionally ordered macroporous (3DOM) Fe2O3 membrane is presented. Then, Al was deposited onto 3DOM Fe2O3 by magnetron sputtering method. DSC showed the heat of reaction equal to 1244.66 J·g-1. Compared to all the techniques disscussed above, this method is simpler, fewer impurities , it makes every reaction component close with each other, and it can make various metal-oxide aviable.

Keywords  Polystyrene template, 3DOM, thermite, Fe2O3/Al, energetic membrane

1  绪论 1

1．1 MEMS 火工品 1

1．2 MEMS火工品用含能薄膜研究现状 1

1.2.1  金属/金属纳米复合含能薄膜 1

1.2.2  Al/金属氧化物纳米复合含能薄膜 3

1.2.3  含能半导体桥 6

1.2.4 纳米多孔硅/氧化剂复合含能薄膜 6

1．3 本论文研究内容 8

2 聚苯乙烯微球的制备与微球模板的组装 9

2．1 实验原理 9

2.1.1 聚苯乙烯球的合成 9

2.1.2 聚苯乙烯微球模板的组装 10

2.2 聚苯乙烯胶晶球的合成及组装实验过程 12

2.2.1 实验材料及测试仪器 12

2.2.2 实验过程 12

2.3 聚苯乙烯胶晶球模板SEM、TEM表征