摘要：本文主要对PVD涂层装备整体结构进行设计，对传动系统、真空获得系统和数控系统等结构进行布局方案设计。并对关键部分使用计算机辅助设计，即软件三维建模。对传动系统，从电动机的选型，减速器的设计计算到夹具的设计计算并设计了夹具的装载小车，对真空获得系统，主要从真空系统类型的选择然后对机械泵和分子泵进行选型。最主要的镀膜真空室结构则根据实验室现有的装备，对各个部分包括加热管靶材等的结构进行相似的设计建模，整体外形尺寸也是根据实验室已有的涂层装备的结构和尺寸进行相应的设计计算和三维建模。最后完成从电机到夹具，到炉腔的建模装配。而总装配图则包括以上所设计的各个系统，并对安装布局进行了方案设计。46934

毕业论文关键词：PVD；装备结构布局；传动系统；真空室；计算机辅助设计

Structure design of PVD coating equipment

Abstract:this paper focuses on the design of overall structure of PVD coating equipment, transmission system, vacuum system and layout design of the numerical control system structure. And uses computer-aided design for key components, namely, software modeling. The transmission system, from the selection of motor, speed reducer design of fixture for fixture design and design of the loaded car, vacuum systems, mainly from the vacuum system type option and then the mechanical pumps and pump selection. The main coating structure is based on the existing laboratory equipment of the vacuum chamber, all parts including heating tube target material and other structure of similar design modeling, overall dimensions are in accordance with the laboratory of coating equipment structures and size of the corresponding design and modeling. Finalized from the motor to the fixture, to the modeling of furnace Chamber Assembly. General Assembly plan including all the above systems, program design and installation layout.

Key words: PVD, equipment layout; transmission systems ；vacuum chambers; computer-aided design

目录

摘要

Abstract

引言 1

1 概述 2

 1.1 PVD技术综述 2

 1.2 PVD涂层原理 2

 1.3 PVD涂层技术 3

 1.4 PVD涂层设备的组成 3

 1.5国内外发展状况 4

2 PVD涂层装备整体结构布局设计 5

 2.1 原始数据及条件 5

 2.2 PVD涂层装备整体外形设计 5

 2.3 PVD涂层整体布局 6

 2.4 PVD涂层设备整体布局方案 7

  2.4.1 方案一 7

  2.4.2 方案二 8

  2.4.3 方案三 8

3 PVD涂层装备传动系统结构设计 10

 3.1 传动系统设计的几个注意点 10

 3.2 传动系统的拟定和简图 10

 3.3 电动机的选择 11

  3.3.1电动机选型 11

  3.3.2 电动机的功率计算 11

  3.3.3 电动机基本参数及简图 12

 3.4 V带传动设计