摘要非接触式的伯努利真空吸盘作为一个新的气动元件，对工件吸取并保持非接触状态。因此，它对被吸工件的优点就是防止污染，无损伤，非接触式等，在药，半导体等对工件的无损和高清洁度行业具有紧迫而广泛的应用需求。

  国际上对此方面的文献报道较少，对伯努利式非接触真空吸盘很少有公开的设计方法和理论可以应用。因此，为了开拓对非接触式真空吸盘的的认识，需要对伯努利真空吸取技术，吸盘式结构设计，动态运行特性和系统集成进行深入的研究。本文通过结构设计，系统仿真，平台设计等研究工作，取得了一定的结果如下：51245

（1）设计出了大型的真空吸盘结构，能吸起大型的硅片，从而为吸盘的结构设计和性能测试打下了基础。

（2）利用Fluent软件数值模拟了吸盘内部的流场，对每个吸盘的也进行了仿真分析，这些结果对于非接触伯努利真空吸盘和系统的设计和运行具有非常重要的参考价值。

（3）设计出一个独特的气体传动系统，能实现出吸盘的灵活运动，从而实现了多方位的吸取大型的硅片功能。这从而使得我们从中获得了伯努利式非接触真空搬运系统的设计和应用的宝贵经验。 

毕业论文关键词：非接触；数值模拟；真空吸盘；系统仿真

Abstract  Non-contact Bernoulli vacuum cups as a new pneumatic components, drawing on the work and maintain a non-contact state. Therefore, it has the advantage of being sucked workpiece is to prevent pollution, no damage, non-contact, etc., in the pharmaceutical, semiconductor and other parts of the non-destructive and on industries with high cleanliness urgent and widespread application requirements.     

     International literature in this area are few reports on the non-contact Bernoulli vacuum cups rarely open design methods and theories can be applied. Therefore, in order to open up to non-contact vacuum sucker awareness, the need for Bernoulli vacuum suction technology, suction cup structure design, dynamic operating characteristics and system integrators in-depth study. In this paper, structural design, system simulation, platform design and other research work and achieved certain results are as follows:    

      (1)Design a large-scale structure of vacuum suction cups can pick up large wafers, thereby sucker structural design and performance testing of the foundation.

      (2)Simulated using the Fluent software sucker internal flow field for each sucker also carried out simulation analysis, the results for the non-contact Bernoulli vacuum cups and system design and operation of a very important reference value.

      (3) Design a unique gas transmission system, to achieve a flexible sucker movement, in order to achieve a multi-faceted absorb large silicon capabilities. It thus allows us to derive a Bernoulli-type non-contact vacuum handling system design and application of valuable experience.

Keywords：non-contact；numerical simulation；vacuum cup；system simulation 

 目  录

第一章 绪论 1

1.1 课题的背景和意义 1

1.2 非接触式真空搬运技术研究现状 1

1.2.1 非接触夹持方式的实现形式 2

1.2.2 非接触夹持方式的优点 4

1.3 伯努利式非接触真空吸盘 5

1.4 主要内容 7

第二章 真空吸盘原理及结构设计 8

2.1 工作原理