MEMS万向惯性开关结构设计研究仿真
首先根据万向开关所处的引信环境，提出了开关应满足的多项性能指标，阐述了开关的工作原理及理论模型；其次根据指标要求，对开关的结构进行了设计，并分析了结构尺寸对开关性能的影响；然后利用有限元仿真，对开关的结构进行了模态分析和瞬态动力学分析，确定了万向开关的具体结构尺寸，验证了开关的万向性以及接触可靠性；最后制定出了开关的加工工艺流程。
关键词 微机电系统 引信 万向开关毕业设计说明书（论文）外文摘要8090
Title Designing and Studying to the structure of MEMS universal inertia switch
Abstract
MEMS (Micro Electro Mechanical Systems) technology made the combination of microelectronics and mechanical system，which adapt to the requirements of the Fuze, made the Fuze function expanded and made the Fuze’s informatization, intelligentization and dexterity be possible, so the Fuze technology can make a qualitative leap. This paper regards the universal switch used to control the detonation circuit as the studying object and analyze the performance of universal switch.
Firstly, this paper puts forward many performance indexes which the switch should meet and expounds its working principle and theory model according to its Fuze environment; Secondly ,according to the index request, design the structure of the switch and analyze the influence of structure size on the performance of the switch; And then,make the Modal Analysis and the Transient Analysis to the switch by using the finite element simulation, which defines the specific structure size of the switch and verifies the universality and contact reliability of the switch; Finally，work out the switch’s fabricate on process.
Keywords Micro Electro Mechanical Systems Fuze Universal switch
目 次
1 绪论 1
1.1 选题背景 1
1.2 本文的主要研究工作 2
1.3 MEMS基本概念 2
1.4 MEMS技术特点 2
1.5 MEMS技术在引信中的应用 3
1.6 国内外MEMS万向开关研究现状 4
2 引信MEMS万向开关的工作环境 7
2.1 勤务处理环境 7
2.2 发射环境 8
2.3 飞行环境 10
2.4 撞击目标环境 11
3 万向开关的技术指标 13
3.1 万向性要求 13
3.2 接触要求 13
3.3 抗过载要求 13
4引信MEMS万向开关的结构设计 14
4.1 万向开关的理论计算 14
4.2 万向开关的质量块和支撑弹簧设计 17
4.3 万向开关的缓冲弹簧设计 17
4.4 万向开关的整体结构图 18
5 引信MEMS万向开关的仿真分析 20
5.1 有限元软件基本概念介绍 20
5.2 万向开关的模态分析 21
5.3 万向开关的瞬态动力学分析 28
5.4 万向开关的抗过载分析 36
5.5 万向开关参数的确定 38
6 万向开关的MEMS工艺技术研究 39
6.1 MEMS加工工艺简介 39
6.2 MEMS万向开关加工工艺流程设计 41
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