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摘要由于具有体积小、成本低、转换效率高等特点，半导体激光器已逐步运用于干涉测量系统中。然而，由于其出射光束垂直、水平发散角不相等以及时域相干性较差等缺点，限制了仪器的测量范围。本文从半导体激光器原理出发，研究了其出射光束模型特征，并对其复振幅分布进行了数值分析。在实验验证环节，将半导体激光器应用于小口径(60mm)斐索型干涉系统中，利用平板剪切干涉调节光源位置，再用夏克-哈特曼传感器定量检测波面质量。利用不同类型光源在不同口径、不同腔长下进行干涉测量，采用傅里叶变换法解算单帧干涉图，获得面形分布之后比对。由理论分析及对比实验可见，半导体激光器在常规扩束结构下，仍然能够满足当前高精度干涉系统测试需求。10003
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关键词： 干涉测量 半导体激光器 剪切干涉 夏克-哈特曼传感器
毕业设计说明书（论文）外文摘要
Title The application of laser diodes in the interferometric test system
Abstract
Due to its small size, low cost, high conversion efficiency, laser diodes have been gradually applied to different kinds of interferometric test system. However, its pergence angle in the plane of the junction is differ from the angle in the plane normal to it, and its temporal coherence is bad, that limits the measurement range. In the thesis, the model of laser diode’s intensity is simulated. In a small aperture Fizeau interferometer, laser diode is aligned using lateral shearing plate. Then the collimated wavefront is measured with the Shack-Hartmann sensor. Interferometric measurements are carried out with different light sources in the system with different apertures and different cavity length. The single frame interferogram is then calculated with Fourier transform method to obtain surface deviation. From both the theoretical and experimental analysis, it is clear to see that the laser diode with normal expanding structure perfectly meets the high precision requirement of interferometric system.
Kayword : interferomety shearing interferometer Shack-Hartmann senson laser diode
目 次
1绪论 1
1.1光干涉测量技术 1
1.2本文的研究背景和意义 2
1.3本文的主要内容 3
2干涉测量技术 5
2.1干涉原理 5
2.2波面检测方法 7
2.2.1泰曼干涉测量 7
2.2.2斐索干涉测量 8
2.3单幅干涉图处理 9
3半导体激光器 12
3.1半导体激光器原理 12
3.1.1半导体激光器的基本原理 12
3.1.2半导体激光器出射光模型 13
3.1.3小功率半导体激光器准直光束模型 15
3.2半导体激光器的准直技术 20
3.3半导体激光器优缺点 20
4半导体激光器在干涉测量中的应用 21
4.1斐索型半导体激光器干涉仪 22
4.2半导体激光器干涉仪出射光波前质量检测 24
4.2.1横向剪切干涉检测 24
4.2.2夏克-哈特曼传感器波前检测 27
4.3半导体激光器干涉测量研究 30
4.3.1半导体激光器不同腔长下干涉测量分析 30
4.3.2准直的半导体激光器不同腔长下干涉测量分析 32
4.3.3半导体激光器平面干涉测量 34
总 结 38