摘要: 在人类社会的科学实验活动中，功能材料总是起着重要的作用，现如今材料已经成为人类社会发展必不可少的物质基础，半导体材料与技术更是成为高新技术产业研究中最活跃的研究领域之一。ZnO作为一种多功能的半导体材料，在相当多的领域都有其十分广泛的应用前景。本课题先在单晶衬底材料上采用了磁控溅射法生长了籽晶层，然后在籽晶层上采用超声喷雾热解法制备了ZnO基薄膜，通过X射线衍射（XRD）和光致发光（PL）手段对比分析了加与不加籽晶层情况下，薄膜的基本结构，结晶质量和光学性能，探讨了ZnO薄膜制备和掺杂过程中，籽晶层对薄膜结晶质量和物理性能的影响，研究了薄膜结晶质量和取向性的控制机理，为制备高质量的ZnO薄膜材料提供研究基础，对促进ZnO薄膜材料的应用具有积极意义。43470

毕业论文关键词：半导体薄膜，结晶，籽晶层，掺杂

The substrate dependency analysis of the crystalline characteristic of ZnO films

Abstract: Functional material is the basis of human social development. Semiconductor materials and technology has been one of the most active areas of high-tech research field. ZnO, as a multifunctional semiconductor material, has a very wide range of applications in many areas. In this topic, the seed layer was deposited by radio sputtering on the single crystal materials, and then ZnO-based films were prepared by ultrasonic spray pyrolysis. The comparison analyses of the structure, crystallinity and optical properties of ZnO-based films on the substrate with and without the seed layer were performed by XRD and PL measurements. The substrate dependency of the crystalline quality and physical properties of ZnO films was studied, and the mechanism of the affect of the seed layer on the film growth mode was discussed. This study can provide the reference for the research of high-quality films material. Meanwhile, these research results will promote the application of ZnO thin films.

Key words：Semiconductor films， crystallinity, seed layer, doping 

目录

摘要 1

Abstract 1

目录 2

1绪论 3

1.1项目背景 3

1.2 研究现状和发展趋势 3

1.2.1国内研究 3

1.2.2国外研究 4

1.2.3发展趋势 4

1.3 研究目的及意义 5

2 ZnO薄膜的制备和结构表征 6

2.1 ZnO薄膜的制备 6

2.1.1衬底处理和籽晶层的制备 6

2.1.2薄膜的制备 7

2.2 ZnO薄膜的结构表征 8

2.2.1 ZnO薄膜的XRD表征 8

2.2.2 ZnO薄膜的PL表征 8

3 ZnO薄膜的结晶质量分析 10

3.1 未掺杂ZnO薄膜的结晶质量分析 10

3.2 掺杂ZnO薄膜的结晶质量分析 11

3.3 籽晶层对ZnO薄膜结晶特性的影响机理 12

4 ZnO薄膜的光学性能分析 14

5 结论和展望 16

致谢 17

参考文献