摘要伴随着微电子、微机械加工技术的提高，MEMS陀螺自上世纪末问世以来已经广泛用于测量物体旋转的速率。所讨论的碟形微机械陀螺具有较高的温度稳定性、高品质因数和抗震性，且降低了对封装的真空度要求，是一种性能较优的新型微机械陀螺。42894

在熟悉MEMS工艺流程的基础上，对碟形陀螺进行了理论分析，设计了碟形陀螺的结构，给出了具体结构的参数后，建立了陀螺的三维实体模型；通过ANSYS有限元软件进行静力分析，研究了极限位置下碟形陀螺的应力状态；对碟形陀螺结构进行了模态分析，得到了较优的模态匹配度；最后对碟形陀螺进行了瞬态分析，获得了陀螺结构在不同状态下的动态响应。

本文的研究为碟形微机械陀螺的结构设计提供了思路，对研究新型微机械陀螺在耦合场下的特性有一定的借鉴意义。

关键词  碟形微机械陀螺  结构设计  理论分析  有限元分析  模态仿真

毕业论文设计说明书外文摘要

Title  Structural Design And Characteristics Research of A Disk 

Micromachined Gyroscope

Abstract

With the improvement of microelectronic and micromachined technology, MEMS gyroscope has been developed rapidly since the end of last century. It is widely used to measure the rate of rotation of an object. The disk micromachined gyroscope which is discussed in this paper has high temperature stability, high quality factor and shock resistance, and it reduces the requirement of vacuum degree, which has better performances of the new micromachined gyroscope.

Based on the analysis of the process of MEMS and the working principle of the disk gyroscope, design the structure of the disk gyroscope, give the parameters of the structure and establish the three- dimensional solid model of the gyroscope. Then the static analysis, stress state analysis of limit position, modal analysis to get superior modal matching degree and transient analysis to get different response are carried out by using ANSYS finite element software.

This paper provides a way for the structural design of the disk micro machined gyroscope. It has certain reference significance for studying the characteristics of the new micro machined gyroscope under the coupling field.

Keywords  Disk resonator gyroscope  Structure design  Theoretical analysis  ANSYS  Modal simulation

目   次

1  绪论 1

1.1  背景综述 1

1.2  国内外研究进展 3

1.3  研究内容 4

2  碟形微机械陀螺工作原理与理论研究 5

2.1  碟形陀螺工作原理 5

2.2  运动方程及公式推导 8

2.3  方程简化求解 13

2.4  仿真验证 14

2.5  本章小结 15

3  碟形微机械陀螺结构设计 17

3.1  初步设计 17

3.2  碟形陀螺三维实体建模 18

3.3  设计思路 20

3.4  本章小结 21

4  碟形微机械陀螺力学特性分析 22

4.1  结构静力学分析 22

4.2  模态分析