摘要本文通过在ZrN基薄膜中添加不同含量的Si，然后采用非平衡磁控溅射方法在单晶硅（100）基片和304不锈钢基片上沉积不同Si含量的复合膜，制备出一系列的Zr1-xSixN薄膜，采用CPX+NHT2+MST纳米力学综合测试系统、JSM-6480型扫描电子显微镜（SEM）及附带的能谱仪（EDS）、UMT-2型高温摩擦磨损仪等仪器研究复合膜的显微结构，力学性能和摩擦磨损性能。结果表明，ZrN薄膜呈（111）面择优生长，ZrSiN复合膜呈现ZrN0。28(002）晶面择优生长，并随着Si元素含量增加，衍射峰强度逐渐加强。当Si含量为90W，120W时，出现微弱且宽化的ZrN（002）晶面衍射峰。当少量Si元素被加入后，薄膜的显微硬度会有一段急剧的下降，当Si靶材的功率上升后，薄膜的显微硬度开始增大。Si元素的加入会使得复合膜的摩擦系数先增大后减小，但是Si元素对于复合膜的摩擦系数没有太大的影响。ZrSiN薄膜中加入Ag对于其力学性能有所下降，但是对于摩擦磨损性能影响不大。80301

毕业论文关键词：ZrSiN薄膜；显微结构；力学性能；摩擦磨损性能

Abstract In this article, through adding different content of Si in the ZrN thin films based on, and then using unbalanced magnetron sputtering on silicon (100) substrate and 304 stainless steel based on deposition with different Si content of the composite membrane prepared by a series of Zr1-xSixN films，Using CPX+NHT2+MST nanomechanical integrated test system,JSM-6480 scanning electron microscope(SEM) and energy dispersive spectrometer incidental(EDS),UMT-2 type high temperature friction and wear and other equipment research microstructure of the composite film,mechanical properties and tribological properties。The results showed that,ZrN film was a (111) preferred orientation ,ZrSiN composite membrane exhibits ZrN0。28(002) crystal plane preferential growth, and with the increase of Si element content, the diffraction peak intensity gradually strengthen。When the Si content is 90W, 120W, appears weak and wide of ZrN (002) crystal face diffraction peak。When a small amount of Si elements are added, the hardness of the film there will be a sharp decline, after the Si target power rises, the hardness of the film begins to increase。Si added element will make the friction coefficient of the composite film first and then decrease, but the Si element is not significantly affected the friction coefficient of the composite membrane。The mechanical properties of ZrSiN thin films decreased with the addition of Ag, but had little effect on the friction and wear properties。 

Keywords:ZrSiN film; Microstructure; Mechanical properties; Tribological properties 

目  录

第一章 绪  论 1

1。1选题的理论意义 1

1。2薄膜的基本信息 1

1。3 ZrN薄膜 3

1。3。1纳米复合膜 3

1。3。2 纳米多层膜 4

1。3。3 ZrN薄膜的特性 5

1。3。4常见几种薄膜制备方法 6

1。3。5 ZrN薄膜的应用 7

1。3。6 Si元素在ZrN薄膜中的作用 9

1。4摩擦磨损理论 9

1。4。1摩擦理论 磨损分类 9

1。4。2影响摩擦的因素 11

1。5本课题的研究内容和方法 13

第二章 实验对象及实验器材 14

2。1 ZrN薄膜 ZrSiN薄膜