摘要移相干涉术（PSI）是一种高精度、高灵敏度、高空间分辨力的非接触式光学测量方法，但它易受环境振动的影响。本论文着重介绍了移相干涉仪抗振技术的研究进展及存在问题，深入了解干涉原理及波长调谐原理，在选用光电位置传感器（PSD）作为光电探测器件探测干涉条纹的抖动量的基础上，利用单片机控制可调谐激光器的调谐波长，实现实时振动补偿。系统根据干涉条纹在PSD光敏面上的位置变化，输出不同的电压，电压接入单片机实现模数转换。根据波长调谐原理确定振动补偿波长，进而确定激光器所需电压。编制电压逻辑转换程序，利用单片机对前面的输入电压进行处理，得到激光器所需电压，再数模转换输出给激光器。63702

毕业论文关键词  移相干涉  抗振  PSD  单片机  波长调谐 

毕业设计说明书（论文）外文摘要

Title   The processing about how to deal with dithering fringes in an active anti-vibration interferometer system

Abstract

Phase-shifting interferometry (PSI) is an non-contact optical measurement method of high-precision, high-sensitivity, high-spatial resolution, but it is vulnerable to the impact of environmental vibration. This paper focus on the phase-shifting interferometer vibration technology processes and problems. In a deep understanding of the interference principle and the wavelength principle and on the basis of choosing an optical position sensor(PSD) as a photodetector to detect the interference fringes jitter, we use SCM to control the tunable wavelength laser to achieve real-time vibration compensation. Based on the changes of the position of interference fringes in PSD photosensitive surface, it will produce different voltages. The voltage gets access to SCM, and then be converted from analog to digital. According to the wavelength tuning principle, we determine the compensation wavelength, and then determine the required voltage of the laser. Prepare the logic conversion process about the voltage, and use SCM to convert the input voltage to the desired voltage, convert it from digital to analog, and then output it to the laser lastly.

Keywords: phase-shifting interferometer, active anti-vibration, PSD, SCM, wavelength tunning.

1  绪论 1

1.1  课题研究背景 1

1.2  本论文的主要工作 2

2  干涉仪的抗振技术的发展状况 3

2.1  自适应主动抗振技术 3

2.1.1  机电反馈抗振术 3

2.1.2  声光频率调制法 3

2.1.3  电光晶体调制补偿法 4

2.2  被动抗振 4

2.2.1  抗振算法 4

2.2.2  同步移相 5

3  干涉测量原理 6

3.1  移相干涉原理 6

3.2  振动对干涉的影响 8

3.3  光点移动量（干涉条纹移动量）的检测 8

3.4  波长调谐抗振技术 11

3.4.1  波长调谐相移斐索干涉仪 11

3.4.2  可调谐半导体激光器 13

4  单片机 15

4.1  单片机简介