Fourier双波长激光调谐移相干涉测试技术的研究
摘要光学干涉测试在光学元件面形检测、光学系统性能判断及光学材料特性测试等方面有着广泛的应用，但是传统的单波长移相干涉测试的范围被其光源工作波长所限制，单波长移相干涉不能用于深度大的表面轮廓测试。双波长移相干涉测试显著地扩大了单波长移相干涉测试的测试范围，实现了大深度面形的高精度测量。79549
本文研究了双波长调谐移相干涉技术的原理和双波长移相算法，利用一维时域的Fourier变换解决在利用定步长相位提取算法时遇到的移相步长标定问题，并对相关算法进行了数值计算和仿真。仿真结果表明：与单波长移相干涉相比，双波长移相干涉能够高精度地完成大深度的表面轮廓测试。
毕业论文关键词 光学干涉测量 双波长移相干涉 波长调谐
毕业设计说明书外文摘要
Title Research on the Test Technology of Two-wavelength Tuning Phase Shifting Interferometry
Abstract Optical interference measurement has been widely used in optical element surface shape measurement, performance estimation of optical system and optical material property testing。 However, the range of traditional single wavelength phase shifting interferometry is limited by the working wavelength of the light source。 The single wavelength phase shifting interferometry can not be applied to the measurement of the surface profile with large depth。 The two-wavelength phase shifting interferometry has significantly expanded the measurement range of the single wavelength phase shifting interferometry, and has realized the high precision measurement of the surface profile with large depth。
The principles of two-wavelength tuning phase shifting interferometry and the two-wavelength phase shifting algorithm are studied in the paper。 One dimensional time domain Fourier transform is used to calibrate the steps when using fixed step phase shifting algorithm。 Also, the numerical calculation and simulation of related algorithms have been carried in the paper。 Compared with the single wavelength phase shifting interferometry, the two-wavelength phase shifting interferometry can complete the measurement of the surface profile with large depth。
Keywords Optical interferometry Two-wavelength phase shifting interferometry wavelength tuning
目 次
1 引言 1
1。1 研究背景 1
1。2 双波长移相干涉测试发展现状 2
1。3 研究内容 3
2 双波长移相干涉测试原理 4
2。1 移相干涉原理 4
2。2 双波长移相干涉原理 5
2。3 双波长移相干涉方式 7
2。4 移相干涉相位恢复算法 11
2。5 本章小结 14
3 双波长激光调谐移相干涉原理 15
3。1 波长调谐原理 15
3。2 双波长激光调谐移相干涉原理 16
3。3 移相步长标定 17
3。5 本章小结 21
4 双波长调谐移相干涉测试仿真