薄膜折射率的测量研究+文献综述(9)
表1：椭偏仪测量SiO2薄膜实验数据1
入射角θ/° A/° P/° Ψ/° Δ/° n21
50 43.45 152.37 46.55 145.26 1.438
55 42.90 159.86 47.08 130.28 1.465
60 42.17 166.41 47.83 117.18 1.455
62 43.42 170.09 46.58 109.82 1.455
64 43.18 173.71 46.82 102.58 1.459
66 42.98 177.32 47.02 95.35 1.460
68 42.81 1.88 47.19 86.24 1.475
69 41.39 5.03 48.61 79.95 1.498
70 43.26 8.08 46.74 73.84 1.519
71 44.98 10.35 45.02 69.31 1.530
72 45.77 12.30 44.23 65.39 1.534
73 46.29 13.44 43.71 63.11 1.518
74 46.34 15.86 43.66 58.28 1.533
75 47.41 17.77 42.59 54.47 1.539
76 47.65 20.01 42.35 49.98 1.554
77 46.53 21.43 43.47 47.14 1.537
78 46.68 23.39 43.32 43.22 1.542
80 46.99 27.60 43.01 34.79 1.571
所测的折射率与入射角度的关系如下图：
表2：椭偏仪测量SiO2薄膜实验数据2
入射角θ/° A/° P/° Ψ/° Δ/° n22
50 42.60 152.21 47.40 145.58 1.445
55 42.81 158.76 47.19 132.48 1.448
60 42.43 165.9 47.57 118.21 1.446
62 41.36 172.58 48.64 104.84 1.501
64 1.501
43.73 176.31 46.27 97.39
66 45.00 0.67 45.00 88.67 1.516
68 45.45 4.00 44.55 82.00 1.512